Longitudinal Composite-Mode Linear Ultrasonic Motor for Motion Servo System of Probe Station

Abstract

In order to build a motion system with high resolution, fast response, and long travel range in a probe station, a linear ultrasonic motor was investigated as an alternative to the electromagnetic counterpart in a servo system. This work focused on a longitudinal composite-mode linear ultrasonic motor for the motion servo system in a probe station. The motor was designed based on the required specifications. A finite element model was built to analyze the dynamic response of the stator. The influence of the structural parameters on the dynamic performances, i.e., sensitivity parameters, was calculated to analyze the stability of the structure. Based on these analytical works, a prototype of the stator was developed and mode testing was conducted. The experimental results showed that the proposed design was able to achieve respectable performance: Despite the dual-mode design, the frequency difference between the two working modes was minimized to 608 Hz; and the prototype could operate stably under 55.4 kHz, providing a 0.5 N load with 980 mm/s speed.

A brief review on the recent evolution in piezoelectric linear ultrasonic motors

“…After the very initial introduction and prototypes of the linear ultrasonic motor, there have been several upgradations in the design specifications, shape and dimension, input requirements and output capacity of the motors over the past two decades [13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29][30]. These alterations have come from the point of view of the various applications and additional requirements that arise with miniaturization of the structures.…”

Design and performance study of a piezoelectric beam conveyor based on the standing wave principle

“…A 'L-shape' piezoelectric motor with two types of secondary bending vibration coupling was proposed by Chu et al [12]. Wang et al [13] presented a longitudinal composite linear ultrasonic motor. A deep ocean linear ultrasonic motor with in-plane expansion was proposed by He et al [14].…”

A Compact Linear Ultrasonic Motor Composed by Double Flexural Vibrator

“…In the existing in-plane mode LUSMs, the operating modes of the stator are different. The difference between working modes varies with the boundary conditions especially when the different vibration modes are excited, for the trend of variation may be opposite in two different vibration modes, resulting in a larger frequency gap between them [ 22 ]. Allowing for the consistency in exciting two working modes, it is beneficial for choosing working modes with the same deformation modes, which lead to the same variation when boundary conditions are changed [ 23 , 24 , 25 ].…”