All-optical NOT, OR, and Exclusive OR(XOR) logic gates using silicon slot waveguides are proposed and numerically analyzed in this work. The structure has a silicon plate with etched regions such as two input waveguides, one output waveguide, and two square cavity resonators. The optical spectra of the designed structures are attained with the finite-difference time-domain (FDTD) method. The optical logic gate features of the structure are achieved by applying optical signals with 0^0 or 180^0 phase difference from the input ports. Basic parameters such as transmission spectrum (T), modulation depth (MD), and contrast ratio (CR) are calculated to show the optical performances of the logic gates. The threshold transmission is 1.7% to define the status of the output ports as ON or OFF. The maximum transmission, modulation depth, and contrast ratio are 149%, 97%, and 15.36 dB, respectively.