Loss mechanism and high-low doping profile effects of silicon substrate with different resistivities at High frequency

Substrate coupling noise considerations for frequencies up to 100GHz

“…High resistivity substrates (HRS) are used for less loss in RF applications [2]. In these applications noise isolation is critical as well as to minimize eddy currents in the substrate and enhance the quality factor of all passive devices built on it that are critical for RF applications [3].…”