Low actuation-voltage shift in MEMS switch using ramp dual-pulse

Abstract

This paper proposes a ramp dual-pulse actuation-voltage waveform that reduces actuation-voltage shift in capacitive microelectromechanical system (MEMS) switches. The proposed waveform as well as two reported waveforms (dual pulse, and novel dual-pulse) are analyzed using equivalent-circuit and equation models. Based on the analysis outcome, the paper provides a clear understanding of trapped charge density in the dielectric. The results show that the proposed actuation-voltage waveform successfully reduces trapped charge and increases lifetime due to lowering of actuation-voltage shift. Using the proposed actuation-voltage waveform, the membrane reaches a steady state on the electrode faster.

Design and Simulation of a Low-Actuation-Voltage MEMS Switch

“…In our previous work a new types of voltage driver was introduced to reduce the capacitive charge of MEMS capacitive switches. The ramp dual-pulse (RDP) actuation voltage increases with constant slope at the beginning of the ON period ( Figure 2) instead of the pulse [33]. However, this will have a negative impact on the switching time of MEMS switches.…”

Design and simulation of a high isolation RF MEMS shunt capacitive switch for C-K band

“…The first major problem is the dielectric charging which we addressed this problem and proposed a novel ramp dual pulse (RDP) to reduce the actuation voltage shift and charging effect on the dielectric in our previous paper [4]. Another drawback of the capacitive MEMS switches is their isolation at low frequencies (X-Band) at down-state, depending on the LC (f resonance =1/2π(LC) À1/2 ) resonant behavior of the switch.…”