Low cost digital vibration meter

Abstract

This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibration of the device in the plane perpendicular to the cantilever beam causes it to bend, which produces a measurable change in the resistance of a piezoresistor. These changes in resistance along with a unique signal-processing scheme are used to determine an approximation to the RMS acceleration sensed by the device.

Automatic Calibration System for Digital-Display Vibrometers Based on Machine Vision

“…Digital-display vibrometers are widely applied in monitoring and fault diagnosis of industrial equipment due to their low energy consumption, high precision, great reliability, and portability [1][2][3][4]. To make all these vibrometers work well, their performance index should be calibrated periodically according to the corresponding metrological regulations like the ordinary vibration pick-ups [5][6].…”