Low-cost nanofabrication of isoporous nanomembranes using hybrid lithography

Rojjanapinun, Akarapan; Pagsuyoin, Sheree; Perman, Jason A.; Sun, Hongwei

doi:10.1016/j.polymertesting.2021.107316

Cited by 6 publications

(1 citation statement)

References 46 publications

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“…As is well known, the top-down process provides more precise control technology for feature size and size distribution; however, the bottom-up process allows more costeffective and affordable control and the production of thick nanopore membranes using only limited quality control. [8][9][10][11] So, both technologies provide a trade-off relationship between cost and quality. The top-down processes can be divided into four categories, including e-beam lithography, extreme ultraviolet (EUV) or X-ray lithography, nanoimprinting, and track-etching.…”

Section: Fabrication Of Sin X Nanopore Filters Using Combined Process...mentioning

confidence: 99%

Fabrication of SiN_x Nanopore Filters Using Combined Process of Nanoimprint and Dual‐Side Aligned Photolithography for Purified Cs₃MnBr₅ Green Phosphors

Kim

Park

et al. 2022

Adv Materials Technologies

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A combined process of nanoimprint lithography and dual‐side aligned photolithography to address misalignment of subsequent layers for the fabrication of SiNx nanoporous membrane filters (SiNx nanofilter) is suggested. Here, in one process, 21 SiNx nanofilter chips are fabricated on a 6 inch Si wafer by aligning nanopore area of nanofilter and template area of nanofilter chip. An SiNx nanofilter chip‐integrated fluidic device is used to test the purification ability of the nanofilter in terms of its pore size and surface hydrophobicity or hydrophilicity. This is the first attempt at separating unnecessary chemical residues from a mixed reactant solution by nanoscale purification process using the tremendous number of nanoholes in the nanofilter. After purification by the nanofilter, high efficiency and narrow‐band Cs3MnBr5 phosphor is synthesized by evaporative crystallization. Here, the photoluminescent quantum yield (PLQY) of the purified Cs3MnBr5 phosphor is monitored to evaluate the purification ability of the SiNx nanofilter. The highest PLQY (53%) of Cs3MnBr5 green phosphors is obtained by purification of reactant solution using nanofilter with 50 nm nanopore diameter and hydrophilic surface. This combined process proves its potential for scalable manufacturing of complex designed SiNx nanofilter chips for chemical species sieving and other applications.

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Section: Fabrication Of Sin X Nanopore Filters Using Combined Process...mentioning

confidence: 99%

Fabrication of SiN_x Nanopore Filters Using Combined Process of Nanoimprint and Dual‐Side Aligned Photolithography for Purified Cs₃MnBr₅ Green Phosphors

Kim

Park

et al. 2022

Adv Materials Technologies

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show abstract

Antifouling mechanisms in and beyond nature: leverages in realization of bioinspired biomimetic antifouling coatings

Murthy,

Nanchariah,

Venkatnarayanan

et al. 2023

Advances in Nanotechnology for Marine Antifouling

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Recent advances in nature-inspired antifouling membranes for water purification

Zhang

Zheng

et al. 2022

Chemical Engineering Journal

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Low-cost nanofabrication of isoporous nanomembranes using hybrid lithography

Cited by 6 publications

References 46 publications

Fabrication of SiN_x Nanopore Filters Using Combined Process of Nanoimprint and Dual‐Side Aligned Photolithography for Purified Cs₃MnBr₅ Green Phosphors

Fabrication of SiN_x Nanopore Filters Using Combined Process of Nanoimprint and Dual‐Side Aligned Photolithography for Purified Cs₃MnBr₅ Green Phosphors

Antifouling mechanisms in and beyond nature: leverages in realization of bioinspired biomimetic antifouling coatings

Recent advances in nature-inspired antifouling membranes for water purification

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Low-cost nanofabrication of isoporous nanomembranes using hybrid lithography

Cited by 6 publications

References 46 publications

Fabrication of SiNx Nanopore Filters Using Combined Process of Nanoimprint and Dual‐Side Aligned Photolithography for Purified Cs3MnBr5 Green Phosphors

Fabrication of SiNx Nanopore Filters Using Combined Process of Nanoimprint and Dual‐Side Aligned Photolithography for Purified Cs3MnBr5 Green Phosphors

Antifouling mechanisms in and beyond nature: leverages in realization of bioinspired biomimetic antifouling coatings

Recent advances in nature-inspired antifouling membranes for water purification

Contact Info

Product

Resources

About

Fabrication of SiN_x Nanopore Filters Using Combined Process of Nanoimprint and Dual‐Side Aligned Photolithography for Purified Cs₃MnBr₅ Green Phosphors

Fabrication of SiN_x Nanopore Filters Using Combined Process of Nanoimprint and Dual‐Side Aligned Photolithography for Purified Cs₃MnBr₅ Green Phosphors