“…The micro-heater temperature estimation was To measure the TCR value, the heater sample is kept on hot chuck and its resistance is recorded at different stabilized temperatures. This experiment gives the TCR estimate as 0.0017 °C −1 (Prajesh et al 2014(Prajesh et al , 2015.…”
Section: Characterization Setup 4 Results and Discussionmentioning
confidence: 99%
“…Fully fabricated wafers are diced in 2.5 × 2.5 mm chips and these chips are wire bonded on standard TO headers (Fig. 2), however alternative packaging techniques (Prajesh et al 2014) can also be used. The sensors are covered with perforated caps which allow the test gas to go in while protecting the device from physical damages.…”
Section: Gas Sensor Fabricationmentioning
confidence: 99%
“…The micro gas sensor is fabricated using MEMS technology. Figure 1 shows the typical schematic of the micro gas sensor device (Prajesh et al 2014), representing different components of the micro-gas sensor device.…”
“…The micro-heater temperature estimation was To measure the TCR value, the heater sample is kept on hot chuck and its resistance is recorded at different stabilized temperatures. This experiment gives the TCR estimate as 0.0017 °C −1 (Prajesh et al 2014(Prajesh et al , 2015.…”
Section: Characterization Setup 4 Results and Discussionmentioning
confidence: 99%
“…Fully fabricated wafers are diced in 2.5 × 2.5 mm chips and these chips are wire bonded on standard TO headers (Fig. 2), however alternative packaging techniques (Prajesh et al 2014) can also be used. The sensors are covered with perforated caps which allow the test gas to go in while protecting the device from physical damages.…”
Section: Gas Sensor Fabricationmentioning
confidence: 99%
“…The micro gas sensor is fabricated using MEMS technology. Figure 1 shows the typical schematic of the micro gas sensor device (Prajesh et al 2014), representing different components of the micro-gas sensor device.…”
“…MOX sensors are also assembled in plastic packages [9,17], however it is not clear how the package withstands possible overheating. In [19] authors proposed PCB FR4 based package for the gas sensor, where a micro-heater heats a membrane that reaches temperature of 275°C, meanwhile the sensor remains at lower temperature. The micro-heater is separated from the PCB by an air gap that acts as an insulator and prevents the PCB from the overheating.…”
The work was supported by the Microsystème_ULg Microsys project, funded by the Wallonia (Belgium), and the Micro+ project (No. 675781-642409) cofunded by the European Regional Development Fund (ERDF) and Wallonia (Belgium).
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