“…However, this technique produces a relatively high percentage of defective parts, leading to a high manufacturing cost. We introduce deep proton writing (DPW) as a candidate technology for the rapid prototyping of a wide variety of micro-optical, micro-mechanical and micro-fluidic components with plenty of applications in photonics (Debaes et al, 2005;Thienpont et al, 2001). Its concept is somewhat comparable to LIGA X-ray lithography (Ehrfeld & Schmidt, 1998), but it uses ions rather than electromagnetic radiation to structure the resist sample.…”