Low-cost satellite attitude control sensors based on integrated infrared detector arrays

Herwaarden, A.W. van

doi:10.1109/19.982939

Cited by 15 publications

(4 citation statements)

References 4 publications

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“…Infrared (IR) detectors have been widely applied in both the military and civil fields, including satellite attitude control, thermograph, gas analysis, and remote temperature sensing [1][2][3][4]. As one type of IR detectors, thermopile IR detectors have attracted increasing attention due to their inherent advantages.…”

Section: Introductionmentioning

confidence: 99%

Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function

Wang

Zhou

et al. 2018

J. Micromech. Microeng.

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This paper presents the design, fabrication and characterization of a CMOS-compatible thermopile infrared (IR) detector with self-test function based on XeF2 front-side dry etching. In order to achieve better performance, a heavily doped N/P-polysilicon is utilized to form thermocouples, and front-side isotropic etching is adopted to release and thermal isolation. At the same time, a platinum heater on the absorption layer is designed to serve as a heat source to realize the self-test function of the thermopile IR detector. IR radiation sensing shows that the detector achieves relatively high responsivity of 160.03 V W−1 and detectivity of and a extremely short response time of 2.5 ms in air at room temperature. In addition, a self-test measurement is conducted and validated by applying a voltage to the heater. Compared with traditional methods for detecting thermopile performance, this method has obvious convenience and simplicity, which provides an effective way for performance monitoring of thermal-based devices.

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Section: Introductionmentioning

confidence: 99%

Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function

Wang

Zhou

et al. 2018

J. Micromech. Microeng.

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“…Therefore, the electric signal is being used to indicate the IR radiation signal. Due to their merits of negligible 1/ f noise, ease of operation and broad spectral response, thermoelectric IR sensors have been widely used in many different applications such as remote temperature sensors and IR gas sensors [11][12][13][14][15][16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Micromachined thermoelectric IR sensors fabricated by a self-aligned process

Xiong

Wang

2010

Smart Mater. Struct.

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In this paper, we report the fabrication and characterization of micromachined thermoelectric IR sensors through a self-aligned technique. Unlike most conventional front-etched thermoelectric IR sensors, etching windows in the self-aligned process are determined by the spacing between polysilicon thermocouple legs. Due to etching windows for structure release being patterned by a self-aligned process rather than as a last photolithography step, the fabrication complication is reduced and narrow etching windows can be patterned. Using the self-aligned process, three types of thermoelectric IR sensors are fabricated and characterized. With SiO 2 /Si 3 N 4 as absorber layer, the sensor with rectangular structure shows the highest responsivity of 43.5 V W −1 , and the circular-shaped sensor with polysilicon strips patterned in the absorber area shows the fastest response and the highest specific detectivity of 3.41 × 10 7 cm √ Hz W −1 . This self-aligned technique is also directly applicable to other MEMS devices with polysilicon as the structure material, and also makes it possible to manufacture ultrasmall gaps.

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“…The application areas served by devices fabricated using MST technologies include, among others: automotive [2], (bio)medicine [3], optical switching for communication [4], control [5], and analytical chemistry [6], [7]. This technology is gradually also penetrating into mainstream instrumentation and measurement (I&M) application areas, such as metrology.…”

Section: Introductionmentioning

confidence: 99%

The relationship between microsystem technology and metrology

Wolffenbuttel

Mullem

2001

IEEE Trans. Instrum. Meas.

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Abstract-Microsystem technology (MST) has enabled silicon sensors to evolve from simple transduction elements to microsystems (micro-instruments) that include readout circuits, self-test, and auto-zeroing facilities. This paper discusses the impact of MST in the instrumentation and measurement (I&M) field. In metrology, in particular, the development of electrical reference standards by using microtechnology has opened a wide variety of potential applications, such as the Josephson junction array (dc voltage reference) and thin-film multijunction thermal converters (ac voltage and ac current reference). It is shown that MST has even more to offer to the I&M field. Two devices that have highly benefited from MST: thermal and capacitive rms-to-dc converters are discussed in historical perspective. Subsequently, a recently developed microdevice, the pull-in voltage reference, which may have a huge impact in I&M applications, is outlined. Finally, it is demonstrated that recent developments in electrical and nonelectrical metrology system concepts offer special opportunities for on-chip cointegrated silicon microsystem realizations.Index Terms-MEMs-based reference, microsystem technology, on-chip reference, pull-in voltage, rms-to-dc converter.

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Low-cost satellite attitude control sensors based on integrated infrared detector arrays

Cited by 15 publications

References 4 publications

Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function

Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function

Micromachined thermoelectric IR sensors fabricated by a self-aligned process

The relationship between microsystem technology and metrology

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