2023
DOI: 10.1364/ao.501175
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Low dark current density extended short-wavelength infrared superlattice photodetector with atomic layer deposited Al2O3 passivation

Hao Li,
Lidan Lu,
Jing Yu
et al.

Abstract: We report on a low dark current density P-B-i-N extended short-wavelength infrared photodetector with atomic layer deposited (ALD) Al2O3 passivation based on a InAs/GaSb/AlSb superlattice. The dark current density of the Al2O3 passivated device was reduced by 38% compared to the unpassivated device. The cutoff wavelength of the photodetector is 1.8 µm at 300 K. The photodetector exhibited a room-temperature (300 K) peak responsivity of 0.44 A/W at 1.52 µm, corresponding to a quantum efficiency of 35.8%. The ph… Show more

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