Low dielectric constant new materials for multilayer ceramic substrate

Kata, Keiichiro; Shimada, Yuzo; Takamizawa, H.

doi:10.1109/33.56183

Cited by 31 publications

(15 citation statements)

References 5 publications

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“…[1][2][3][4][5] The LTCC technology combines the possibilities of the thick film and hightemperature co-fired ceramics (HTCC) technology with the advantage of a low sintering temperature of o9001C. The demands for compact electrical assemblies, smaller power loss, as well as high signal density and signal velocity can be fulfilled by low-temperature co-fired ceramics (LTCC)-based multilayers.…”

Section: Introductionmentioning

confidence: 99%

Effect of Friction on Inhomogeneous Shrinkage Behavior of Structured LTCC Tapes

Pohle

Wagner

Roosen

2006

Journal of the American Ceramic Society

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Vias, cavities, and other cutouts are significant inhomogeneities in low temperature co‐fired ceramics (LTCC) tapes and lead to inhomogeneous shrinkage during sintering, which has a negative effect on the quality of the final multilayer device. The influence of such cutouts on the shrinkage behavior of LTCC tapes was investigated by an exact measurement of the geometry before and after sintering and by in situ observations with an optical dilatometer. The investigations show a strong influence of cutouts on the magnitude of shrinkage inhomogeneities. This effect is more pronounced, if the tapes become thinner, the dimensions of the cutouts become larger, or their position becomes less centric. It is shown that the most important factor on the occurrence of shrinkage inhomogeneities in tapes with cutouts is the static friction of the LTCC material on the setter. Severe warpage is caused by interlocking effects, which occur at bumps of the rough setter surface when the inner edges of the cutouts are pulled over the setter. By using a separating agent between the LTCC tape and the setter, the static friction could be minimized, which eliminates the sintering inhomogeneities.

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Section: Introductionmentioning

confidence: 99%

Effect of Friction on Inhomogeneous Shrinkage Behavior of Structured LTCC Tapes

Pohle

Wagner

Roosen

2006

Journal of the American Ceramic Society

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“…The CTEs of the glass-ceramic systems are ranging from 3.2 to 8.2 ppm/ • C. CBS-9 glass-ceramic, containing the largest amount of quartz SiO 2 phase among the various compositions studied, has the lowest CTE. For all systems, there is no abrupt change in slope at 200-270 • C, which was caused by the displacive phase transformation of SiO 2 cristobalite phase [15]. Absent of the abnormal Fig.…”

Section: Resultsmentioning

confidence: 88%

Characterizations of CaO–B2O3–SiO2 glass–ceramics: Thermal and electrical properties

Chiang

Wang

et al. 2008

Journal of Alloys and Compounds

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“…Several approaches, including glass-ceramics (crystallizable glass) and glass + ceramics (multiphase ceramics) [3][4][5][6][7], have been adopted to fabricate ceramic substrates. The properties of LTCC substrate materials depend on the properties and the extent of each phase present and the morphology, continuity, and connectivity of each phase [6,8].…”

Section: Introductionmentioning

confidence: 99%