Low drift air-gap CMOS-FET gas sensor

Hybrid gas sensor platform based on capacitive coupled field effect transistors: Ammonia and nitrogen dioxide detection

“…The challenge in the SG-FET sensor design and production nowadays is to provide additional facilities besides a good performance [9,[11][12][13]. In order to compensate the limited selectivity of the sensing materials, sensor combinations or arrays are often required.…”

“…During the last decade, many authors tried to optimise or innovate the gas-FET structures [6][7][8][9][10][11][12][13][14][15] and different organic and inorganic materials (metals, metal oxides and organic semiconductors, and even non-conducting polymers), able to produce an electrical potential response when interacting with the target gases, have been deposited on SG and tested as sensing layers [10][11][12][13][14][15][16][17][18][19]. The interest for the field effect gas sensing was continuously increasing so that since 2000, more than 60 referred articles and communications have been published.…”