Abstract:Conspectus
Microelectromechanical systems
(MEMS) that integrate tiny mechanical
devices with electronics on a semiconductor substate have experienced
explosive growth over the past decades. MEMS have a range of wide
applications from accelerometers and gyroscopes in automotive safety,
to precise reference oscillators in consumer electrons to probes in
atomic force microscopy and sensors for gravitational wave detection.
The quality (Q)-factor is a fundamental parameter
of a MEMS resonator that determines the s… Show more
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