The composition of active particles in a plasma was calculated for the conditions of dielectric bar rier discharge at atmospheric pressure in oxygen from the measured waveforms of current and voltage using joint solution of the Boltzmann equation and the equations of chemical kinetics. Kinetic equations included the reactions involving O 2 and H 2 O molecules (the main plasma gas), their dissociation products, and the excited states of molecules O 2 and atoms O. It is shown that the main neutral components of such plasma are molecules O 3 , O 2 (a 1 Δ g ), H 2 O 2 , and OH. The mechanisms of formation and destruction of these components are studied.