Abstract:In this paper, the rate coefficients (k) and activation energies (Ea) for SiCl4, SiHCl3, and Si(CH3)2(CH2Cl)Cl molecules in the gas phase were measured using the pulsed Townsend technique. The experiment was performed in the temperature range of 298–378 K, and carbon dioxide was used as a buffer gas. The obtained k depended on temperature in accordance with the Arrhenius equation. From the fit to the experimental data points with function described by the Arrhenius equation, the activation energies (Ea) were d… Show more
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