Low-energy electron distribution in an electron-beam-generated argon plasma

Bretagne, J.; Godart, J.; Puech, Vincent

doi:10.1088/0022-3727/15/11/014

Cited by 91 publications

(67 citation statements)

References 15 publications

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“…For super-elastic collisions with excimers, for which no inverse process exists, the cross section given by Bretagne [24] was used.…”

Section: Treatment Of the Boltzmann-equationmentioning

confidence: 99%

“…To calculate those cross sections, the formula proposed by Bretagne [24] was used. The total ionization cross section can be calculated by…”

Section: Treatment Of the Boltzmann-equationmentioning

confidence: 99%

“…Finally, the simulation results are presented and discussed. The model used in this study is based on the models of Bretagne [23,24], Rockwood [22] and Elliot and Greene [25]. It includes electrons,…”

Section: Introductionmentioning

confidence: 99%

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Investigations on the afterglow of a thin cathode discharge in argon at atmospheric pressure

Mohr¹,

Du²,

Luggenhölscher³

et al. 2010

J. Phys. D: Appl. Phys.

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Abstract.A thin cathode discharge consists of two electrodes separated by a dielectric layer with a thickness of ca. 100 µm. The shape of the anode can be chosen arbitrarily, while the thickness of the cathode is also about 100 µm. Through this "sandwich", a hole with a diameter of 200 µm is drilled. When such a device is operated at pressures of several 100 hPa, it shows a self-pulsing behaviour in which high electron densities of several Electrical measurements showed, that this can be explained by the repeated ignition of a shortliving spark discharge. Due to the high pressure and the related high collision frequencies, the afterglow of this discharge was expected to last several 10 ns. Instead, lifetimes of several 100 ns were observed. In order to identify the mechanisms responsible for this long living afterglow, a kinetic model of the afterglow was developed. As a result, Penning-ionization, superelastic collisions with both atoms in excited states and excimers were found to play a crucial role in the production and heating of electrons.

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“…For super-elastic collisions with excimers, for which no inverse process exists, the cross section given by Bretagne [24] was used.…”

Section: Treatment Of the Boltzmann-equationmentioning

confidence: 99%

“…To calculate those cross sections, the formula proposed by Bretagne [24] was used. The total ionization cross section can be calculated by…”

Section: Treatment Of the Boltzmann-equationmentioning

confidence: 99%

See 1 more Smart Citation

Investigations on the afterglow of a thin cathode discharge in argon at atmospheric pressure

Mohr¹,

Du²,

Luggenhölscher³

et al. 2010

J. Phys. D: Appl. Phys.

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“…The EEPF dominates the balance in a variety of electron impact plasma‐chemical reactions, where the reaction rate depends on the electron temperature. A low energy EEPF was studied as early as in 1982, in a high current (10 6 Am −2 ) EB generated argon plasma, where the Rockwood formalism was used to account for non‐equilibrium energy distribution . The controlling effect of EB injection on the EEPF and the chemical reaction rate has been demonstrated, by injecting a high energy (100 eV) EB into capacitive coupled plasma (CCP) and inductive coupled plasma (ICP) .…”

Section: Introductionmentioning

confidence: 99%

“…A low energy EEPF was studied as early as in 1982, in a high current (10 6 Am −2 ) EB generated argon plasma, where the Rockwood formalism was used to account for non-equilibrium energy distribution. [7] The controlling effect of EB injection on the EEPF and the chemical reaction rate has been demonstrated, by injecting a high energy (100 eV) EB into capacitive coupled plasma (CCP) [8] and inductive coupled plasma (ICP). [9] The authors have applied a global model (0D) to artificially include the effect of a high energy tailoring of the EEPF in radio frequency (rf) argon discharges, at pressure of 20 mTorr, rf voltage of 500 V, and frequency of 13.56 MHz.…”

Section: Introductionmentioning

confidence: 99%

Electron energy probability function modulation with external electron beam in capacitive coupled radio frequency discharges

Zhang

Huang

et al. 2017

Plasma Processes & Polymers

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We investigate the effect of external electron beam injection on plasma kinetics of a radio‐frequency (rf) capacitive argon discharge at a pressure of 100 mTorr. The rf voltage is applied to the one electrode. Monoenergetic electron beam is injected from the other electrode, with a laboratory accessible injection current and energy. The electron beam injected electrode is grounded. A direct‐implicit particle‐in‐cell/Monte‐Carlo method is used to self‐consistently simulate the plasma density, electron temperature, plasma potential, electron energy probability function (EEPF), and the electron and ion fluxes. The presence of the electron beam increases the plasma density, while decreases the electron temperature and the plasma potential. The plasma density can increase by a factor of 5, at the same time the electron temperature can decrease from 3 to 0.5 eV. The reason is that, with the electron injection, there are more low‐energy electrons occupation in the EEPF. The EEPF is sensitive to the beam modulation: even a small beam current of 0.01A can modify the EEPF significantly. This may have crucial importance for plasma processing of polymers and graphene, where low energy treatment is desired. In addition, electron and ion fluxes to the ground electrode, are also significantly modified with increasing flux and decreasing bombardment energy.

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Kinetic Study of Electron Beam Excited Argon

Bretagne

Godart

Puech

1983

Contrib Plasma Phys

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An experimental and theoretical study of the interaction between Argon and a high-energy short-pulse electron beam is reported. A theoretical model describing the argon atom and molecule with ten effective levels and taking into account all the reactions that these levels mny suffered is developped. A comparison, based on time resolved V.U.V. and visible fluorescences and electron density determination, between the theoretical and experimental results shows the ability of our model to describe the interaction in all the experimental range, 400 < P < 5000 Torr, studied.

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Low-energy electron distribution in an electron-beam-generated argon plasma

Abstract: The distribution function at low energy, u Show more

Cited by 91 publications

References 15 publications

Investigations on the afterglow of a thin cathode discharge in argon at atmospheric pressure

Investigations on the afterglow of a thin cathode discharge in argon at atmospheric pressure

Electron energy probability function modulation with external electron beam in capacitive coupled radio frequency discharges

Kinetic Study of Electron Beam Excited Argon

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