Low-energy femtosecond pulsed laser deposition of cerium (IV) oxide thin films on silicon substrates

Mesa, Joseph A. De; Rillera, Angelo; Empizo, Melvin John F.; Sarukura, Nobuhiko; Sarmago, Roland V.; Garcia, Wilson

doi:10.1016/j.jcrysgro.2021.126323

Cited by 3 publications

(2 citation statements)

References 38 publications

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“…However, due to the absorption of multiple lower energy photons and energy accumulation from multiple pulses throughout the deposition, this cumulative process provides the ionization needed energy per atom, as recently demonstrated by De Mesa et al where CeO 2 thin films were deposited with good stoichiometry using low-energy fs-PLD. 40) Al, which has low cohesive energy, will be easier to ablate and is observed at large quantities as compared to Nd and Y. With considerably higher cohesive energy compared to other elements in the target, Y requires higher energy to dissociate into neutral atoms from the Nd:YAG target.…”

Section: Discussionmentioning

confidence: 99%

“…As a result, fs-PLD has been utilized in several works to deposit oxide films. 34,36,39,40) A particular area of interest, especially with oxide materials, is the deposition of nanostructured oxide films. The use of ns-PLD led to the overimposition of larger particles in the micron range, which is unfavorable for the application of oxide-based devices.…”

Section: Introductionmentioning

confidence: 99%

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Low energy femtosecond pulsed laser ablation of Nd:YAG laser crystal in high-pressure oxygen and nitrogen background gas

De Mata,

Valenzona,

Lacaba

et al. 2024

Jpn. J. Appl. Phys.

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Low-energy femtosecond pulsed laser was utilized to ablate Nd:YAG laser crystal in a high-pressure oxygen and nitrogen background gases. Only minute amounts of neodymium, yttrium, and aluminum were detected in the deposited material due to the thermalization resulting from low laser pulse energy and significant scattering caused by the high background gas pressure. We used a collision-based model and peak-fitting of the plume angular distribution to explain the result. The collision-based model was used to explain and determine the probability distribution of the elements arriving from the target to the substrate. The magnitude of the probability distribution obtained with O2 gas is higher compared to N2 gas owing to the former’s higher collision frequency. The peak-fitting method of the angular distribution provided better approximations of the ratio of atoms arriving after ablation as compared to collision-based model. Further improvements can be carried out to better predict the deposited material ratio.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Low energy femtosecond pulsed laser ablation of Nd:YAG laser crystal in high-pressure oxygen and nitrogen background gas

De Mata,

Valenzona,

Lacaba

et al. 2024

Jpn. J. Appl. Phys.

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Pulsed laser deposition of nanostructured CeO2 antireflection coating for silicon solar cell

Abdulrahman,

Jawad,

Ismail

2023

J Mater Sci: Mater Electron

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Femtosecond laser micro/nano processing: from fundamental to applications

Gao,

Zhang,

2024

Int. J. Extrem. Manuf.

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Able to precise control and manipulate materials’ states at micro/nano-scale level, femtosecond laser micro/nano processing technology has underwent tremendous development over the past three decades. Free-forming three-dimensional microscale functional devices and inducing fascinating and unique physical or chemical phenomena have granted this technology with powerful versatility that no other technology can match. As this technology advances rapidly in various fields of application, some key challenges have emerged and remain to be urgently addressed. This review firstly introduces the fundamental principles for understanding how femtosecond laser pulses interact with materials and the associated unique phenomena in section 2. Then micro/nano-fabrication in transparent materials by femtosecond laser processing is presented in section 3. Thereafter, several high efficiency/throughput fabrication methods as well as pulse-shaping techniques are listed in section 4, and section 5 reviews four-dimensional and nanoscale printing realized by femtosecond laser processing technology. A special attention is paid to the heterogeneous integration of functional materials enabled by femtosecond laser processing in section 6. Several intriguing examples of three-dimensional functional micro-devices created by femtosecond laser based manufacturing methods such as microfluidics, lab-on-chip, micro-optics, micro-mechanics, micro-electronics, micro-bots and microbiodevices are reviewed in section 7. Finally, a summary of the review and a perspective are proposed to explore the challenges and future opportunities for further betterment of femtosecond laser micro/nano processing technology.

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Low-energy femtosecond pulsed laser deposition of cerium (IV) oxide thin films on silicon substrates

Cited by 3 publications

References 38 publications

Low energy femtosecond pulsed laser ablation of Nd:YAG laser crystal in high-pressure oxygen and nitrogen background gas

Low energy femtosecond pulsed laser ablation of Nd:YAG laser crystal in high-pressure oxygen and nitrogen background gas

Pulsed laser deposition of nanostructured CeO2 antireflection coating for silicon solar cell

Femtosecond laser micro/nano processing: from fundamental to applications

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