Low-energy ion beam erosion of Si with simultaneous co-deposition of metallic surfactants: Experimental and simulated data

Linß, F.; Bundesmann, C.; Frost, F.

doi:10.1016/j.apsusc.2023.158923

Applied Surface Science

2024

DOI: 10.1016/j.apsusc.2023.158923

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Low-energy ion beam erosion of Si with simultaneous co-deposition of metallic surfactants: Experimental and simulated data

F. Linß,

C. Bundesmann,

F. Frost

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Low-energy ion beam erosion of Si with simultaneous co-deposition of metallic surfactants: Experimental and simulated data

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References 31 publications

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