Low-energy ions source of plane geometry on the basis of plasma-beam discharge with a slot cathode

The dynamics of a nanosecond gas discharge development with an extended slot cathode in argon

“…For such technological applications, various plasma systems for the formation and generation of ion fluxes with controlled ion energy are investigated. One of the effective sources of low-energy ion fluxes consists of a beam plasma having the spatial configuration of a 'plasma sheet' whose surface functions as a wide-aperture ion emitter in the transverse direction [4,10,11]. For the formation of such ion flux sources, extended ribbon electron beams are required, particularly in terms of a high-voltage transverse nanosecond discharge generated by an extended slot cathode.…”

“…In such a gas-discharge system, a ribbon electron beam is generated as a result of the emission of electrons from a cold cathode under the influence of bombardment by highenergy ions and atoms, as well as their acceleration in the region of the cathode potential drop (CPD) [12,13]. By using ribbon electron beams behind the mesh anode in the region beside the collector, it has been shown that a beam plasma is created in the form of a thin 'plasma sheet' acting as the emitting surface of a wide-aperture beam formed by accelerated ions [11]. Such a constructive use of a nanosecond discharge with a slot cathode requires a more detailed study of the dynamics of formation and the space-time distribution of the main parameters of the discharge.…”