2011
DOI: 10.1557/opl.2011.918
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Low Energy Ne Scattering Spectroscopy for Insulators, and Materials in the Electric/Magnetic Fields

Abstract: This study describes a low-energy atom scattering system that was combined with a time-of-flight spectrometer for insulator surface structural analysis. We show one example. MgO(001) crystal was used to study the surface analysis technique and is illustrated here. Insulator surface structure is difficult to study because of the charging effects during electron or ion-beam bombardment. Nevertheless, structural analysis of insulator surfaces is very important in fundamental research as well as in technology fiel… Show more

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Cited by 4 publications
(1 citation statement)
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“…Therefore, we developed a low-energy atom scattering (LEAS) spectroscopy system for analyzing such insulator surfaces. [10][11][12][13][14] A low-energy atom beam is produced by passing an ion beam through a gas of the same type as the ion beam. 15,16) The surface structure can be directly determined in a real space by analyzing the angular anisotropy of atom scattering intensities.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, we developed a low-energy atom scattering (LEAS) spectroscopy system for analyzing such insulator surfaces. [10][11][12][13][14] A low-energy atom beam is produced by passing an ion beam through a gas of the same type as the ion beam. 15,16) The surface structure can be directly determined in a real space by analyzing the angular anisotropy of atom scattering intensities.…”
Section: Introductionmentioning
confidence: 99%