Low energy post-growth irradiation of amorphous hydrogenated carbon (a-C:H) films

Šilinskas, M.; Grigonis, A.

doi:10.1016/s0925-9635(01)00734-8

Cited by 30 publications

(22 citation statements)

References 21 publications

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“…At higher intensity of ∼5 MW/cm 2 , the D mode decreased with respect to the G mode and shifted towards lower frequency (by about 10-20 cm −1 ) whereas the position of the G mode remained almost unchanged. The red shift of the D mode could be due to the influence of the mode at ∼1260 cm −1 attributed to diamond nanocrystals [12] and could indicate the mutual transformations sp 2 ↔ sp 3 between the bonds of different types. In addition, a possible formation of SiC (∼950 cm −1 ) should also lead to an increase of sp 3 bonds as well as an increase of Si amount in a-C:H films [13].…”

Section: Methodsmentioning

confidence: 99%

Modification of amorphous a-C:H films by laser irradiation

Grigonis¹

2007

Lithuanian J. Phys.

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Amorphous diamond-like hydrogenated carbon films a-C:H were formed on Si wafers by a direct ion beam deposition method from acetylene or a gas mixture of acetylene and hydrogen. The samples were irradiated in a scanning mode by second harmonic (wavelength λ = 532 nm) of a Q-switched YAG : Nd laser. The effect of laser irradiation was studied by Raman and infrared spectroscopy and spectroscopic ellipsometry. The changes in the optical spectra of the samples with different H amount were investigated in the dependence on laser intensity. Experimental data were interpreted taking into account the structural transformations of a-C:H films.

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Section: Methodsmentioning

confidence: 99%

Modification of amorphous a-C:H films by laser irradiation

Grigonis¹

2007

Lithuanian J. Phys.

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“…Under irradiation conditions (4 MW/cm 2 , 8 pulses per spot) the 3.48 eV energy photons stimulated formation of glassy carbon [16] (Fig. 1 B3-3).…”

Section: Resultsmentioning

confidence: 96%

“…The E g of the non-irradiated DLC films varies in the 1 4 − 1 65 eV range [16]. In case of the IR-irradiation the Si substrate absorbed more photons than the film.…”

Section: Resultsmentioning

confidence: 99%

Modification of the amorphous carbon films by the ns-laser irradiation

Grigonis¹,

Marcinauskas²,

Vinciūnaitė³

et al. 2011

Open Physics

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Abstract:The effect of a nanosecond laser irradiation of thin (60 and 145 nm) amorphous, diamond-like carbon films deposited on Si substrate by an ion beam deposition (IBD) from pure acetylene and acetylene/hydrogen (1:2) gas mixture was analyzed in this work. The films were irradiated with the infrared (IR) and ultraviolet (UV) radiation of the nanosecond Nd:YAG lasers working at the first (1.16 eV) and the third (3.48 eV) harmonics, using a multi-shot regime. The IR laser irradiation stimulated a minor increase in the fraction of sp 2 bonds, causing a slight decrease in the hardness of the films and initiated SiC formation. Irradiation with the UV laser caused the formation of carbides and increased hydrogenization of the Si substrate and the fraction of sp 2 sites. Spalliation and ablation were observed at a higher energy density and with a large number of laser pulses per spot.

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“…The substrate surfaces were variously treated before the deposition procedure. Details of the growth technology and the structure of DLC films are described in [22,23].…”

Section: Methodsmentioning

confidence: 99%

Optical properties of amorphous hydrogenated carbon films

Babonas¹,

Rėza²,

Grigonis³

et al. 2004

Lith. J. Phys.

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Amorphous diamond-like hydrogenated carbon films grown on a Si substrate from C2H2 + H2 plasma were investigated. The ellipsometric and reflectance technique was used to reveal the optical constants of a-C:H films from the optical response of the complex system in the UV-VIS-NIR spectral range of 0.5-5.0 eV. The model of an effective film was used for a-C:H films though in the analysis of the optical response a multilayer model was applied. Particular features of optical properties were correlated to the technological peculiarities and structural characteristics of a-C:H films grown from C2H2 + H2 plasma.

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Low energy post-growth irradiation of amorphous hydrogenated carbon (a-C:H) films

Cited by 30 publications

References 21 publications

Modification of amorphous a-C:H films by laser irradiation

Modification of amorphous a-C:H films by laser irradiation

Modification of the amorphous carbon films by the ns-laser irradiation

Optical properties of amorphous hydrogenated carbon films

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