Grain boundaries play an important role in low-field magnetoresistance of La0.7 Ca0.3 MnO 3 and La0.7 Sr0.3 MnO 3 thin films deposited by magnetron sputtering and pulsed laser deposition on YSZ(100) and silicon substrates buffered by YSZ. Well-pronounced low-field magnetoresistance hysteresis was observed in magnetic fields applied in in-plane and out-of-plane directions. Recently the colossal magnetoresistance (CMR) phenomenon has attracted much attention as both a fundamental research and an applied science challenge [1]. It has been demonstrated that low-field magnetoresistance (LFMR) effects have an important influence in bulk polycrystalline materials [2,3], polycrystalline thin films [4][5][6], and thin films with reduced epitaxy [7,8]. It was established that the control of crystallinity perfection of thin manganite films, such as epitaxial strain or granularity, could be utilized for tuning of their MR properties, especially of LFMR [6][7][8]. In this paper, the influence of preparation conditions during magnetron sputtering (MS) or pulsed laser deposition (PLD) using various substrates on the resulting MR behaviour is investigated.La0.7Ca0.3MnO3 (LCMO) thin films were prepared by magnetron sputtering and La0 .7Sr0.3 ΜnO3 (LSMO) thin films by PLD using ceramic targets (cf. Refs. [5,6]). The substrates were monocrystalline plates (i) of Y-stabilised ZrO 2 (100) (YSZ) and (ii) of silicon buffered by YSZ layers. The structure of the deposited films was characterized by SEM and X-ray diffraction using Co Κα radiation. Magnetic measurements were carried out in an ac susceptometer and a SQUID magnetometer at fields up to 50 kOe. The resistivity was measured by the four-probe technique in a superconducting split-coil magnet at fields