“…The intermixing at the Si/Fe and Fe/Be interfaces has to be considered by the analysis of sets of samples (before and after deposition, treatments, various processing, respectively). While the deposition of the Be films is subject to special regulations, the Be/W bilayers have been obtained in a special installation, using the thermionic vacuum arc (TVA) method, which is an original technology placed between electron beam evaporation and electrical vacuum arc discharge [4,5]. An electron beam can evaporate the material of interest, placed at the anode, as neutral particles which can be directly deposited on the substrate, placed at the cathode, for enough low electron energies and beam intensities.…”