2004
DOI: 10.1016/j.vacuum.2004.07.002
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Low friction silver-DLC coatings prepared by thermionic vacuum arc method

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Cited by 38 publications
(19 citation statements)
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“…The intermixing at the Si/Fe and Fe/Be interfaces has to be considered by the analysis of sets of samples (before and after deposition, treatments, various processing, respectively). While the deposition of the Be films is subject to special regulations, the Be/W bilayers have been obtained in a special installation, using the thermionic vacuum arc (TVA) method, which is an original technology placed between electron beam evaporation and electrical vacuum arc discharge [4,5]. An electron beam can evaporate the material of interest, placed at the anode, as neutral particles which can be directly deposited on the substrate, placed at the cathode, for enough low electron energies and beam intensities.…”
Section: Methodsmentioning
confidence: 99%
“…The intermixing at the Si/Fe and Fe/Be interfaces has to be considered by the analysis of sets of samples (before and after deposition, treatments, various processing, respectively). While the deposition of the Be films is subject to special regulations, the Be/W bilayers have been obtained in a special installation, using the thermionic vacuum arc (TVA) method, which is an original technology placed between electron beam evaporation and electrical vacuum arc discharge [4,5]. An electron beam can evaporate the material of interest, placed at the anode, as neutral particles which can be directly deposited on the substrate, placed at the cathode, for enough low electron energies and beam intensities.…”
Section: Methodsmentioning
confidence: 99%
“…For preparation of granular nanostructured GMR films, an original technology, which is placed between electron beam evaporation and electrical vacuum arc discharge, known as thermionic vacuum arc (TVA) technology was used [5][6][7][8]. The method uses an electron beam emitted by an externally heated cathode (a tungsten grounded filament) accelerated by a high anodic voltage.…”
Section: Tva Methodsmentioning
confidence: 99%
“…Various 500-2500-nm thick coatings of pure beryllium or different mixtures of beryllium and tungsten were produced for the experiments by the thermoionic vacuum arc (TVA) method [3]. The ratio of beryllium and tungsten (in at.%) in the mixed layers varied from 75:25 to 95:5.…”
Section: Experimental Systemmentioning
confidence: 99%