2017
DOI: 10.1515/mms-2017-0048
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Low Humidity Characteristics of Polymer-Based Capacitive Humidity Sensors

Abstract: Polymer-based capacitive humidity sensors emerged around 40 years ago; nevertheless, they currently constitute large part of sensors' market within a range of medium (climatic and industrial) humidity 20−80%RH due to their linearity, stability and cost-effectiveness. However, for low humidity values (0−20%RH) that type of sensor exhibits increasingly nonlinear characteristics with decreasing of humidity values. This paper presents the results of some experimental trials of CMOS polymer-based capacitive humidit… Show more

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Cited by 10 publications
(3 citation statements)
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“…Some of the most recent relative humidity sensors have employed new materials as moisture-sensitive layers. These materials include porous ceramic oxides [9], [10], polymers [11], [12], and electrolytes [13], [14]. Ceramic oxides can be prepared by conventional or advanced processing, and their extensive use as humidity sensors is due to their hydrophilic nature, so water vapor can easily penetrate through the pore openings.…”
Section: Introductionmentioning
confidence: 99%
“…Some of the most recent relative humidity sensors have employed new materials as moisture-sensitive layers. These materials include porous ceramic oxides [9], [10], polymers [11], [12], and electrolytes [13], [14]. Ceramic oxides can be prepared by conventional or advanced processing, and their extensive use as humidity sensors is due to their hydrophilic nature, so water vapor can easily penetrate through the pore openings.…”
Section: Introductionmentioning
confidence: 99%
“…In the Kapton ® structure, the carboxyl groups –C=O are the primary bonding sites for the adsorption of water vapor molecules. Also, the ether groups C–O–C and N–C groups can constitute adsorption sites [ 20 ].…”
Section: Discussionmentioning
confidence: 99%
“…With the development of an intelligent modern society, humidity sensors are widely used in multifarious fields such as environmental monitoring, 1 automobile defogging, 2 production line, 3 respiratory monitoring, 4–6 medical care, 7 agriculture and forestry breeding, 8 meteorological detection, 9 food logistics and transportation, 10 and wearable flexible equipment. 11 As a precision instrument for humidity measurement, it is highly vital for a humidity sensor to satisfy higher requirements for its accuracy, sensitivity, excellent stability and compatibility.…”
Section: Introductionmentioning
confidence: 99%