2019
DOI: 10.3390/s19030680
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Low-Hysteresis and Fast Response Time Humidity Sensors Using Suspended Functionalized Carbon Nanotubes

Abstract: A humidity sensor using suspended carbon nanotubes (CNTs) was fabricated using a low-temperature surface micromachining process. The CNTs were functionalized with carboxylic acid groups that facilitated the interaction of water vapor with the CNTs. The humidity sensor showed a response time of 12 s and a recovery time of 47 s, along with superior hysteresis and stable performance. The hysteresis curve area of the suspended structure is 3.6, a 3.2-fold reduction in comparison to the non-suspended structure. A c… Show more

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Cited by 38 publications
(21 citation statements)
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“…The idea of exploiting metal oxide (MOX) nanoparticles and nanostructures for moisture/gas detection is quite popular. The existence of extremely easy and inexpensive preparation techniques of nanostructured MOX materials is strongly pushing toward this solution [1][2][3][4][5][6][7][8]. Obviously, the very high surface/volume ratio of these materials is an optimal feature for all the sensing applications related to the adsorption of gaseous species.…”
Section: Introductionmentioning
confidence: 99%
“…The idea of exploiting metal oxide (MOX) nanoparticles and nanostructures for moisture/gas detection is quite popular. The existence of extremely easy and inexpensive preparation techniques of nanostructured MOX materials is strongly pushing toward this solution [1][2][3][4][5][6][7][8]. Obviously, the very high surface/volume ratio of these materials is an optimal feature for all the sensing applications related to the adsorption of gaseous species.…”
Section: Introductionmentioning
confidence: 99%
“…The humidity sensing performance and characteristics of the CNT@CPM flexible sensors were compared with other previously published resistance-based humidity sensor papers [40][41][42][43][44][45][46][47][48][49][50]. Obtained using various sensor materials, as shown in Table 3.…”
Section: Resultsmentioning
confidence: 99%
“…Note the dynamic response of resistive Pt-In 2 O 3 sensor to RH was also measured, but no resistance change of the sensing material was observed (from 3.3 to 18% RH). The response time t res and recovery time t rec are defined as the time required for the current to change to 90% of its final value [ 33 ]. Figure 5 c presents the variations of t res and t rec of the FET-type sensor with RH of 3.3–18%.…”
Section: Resultsmentioning
confidence: 99%