2003
DOI: 10.1364/josab.20.001844
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Low-loss waveguides in ultrafast laser-deposited As_2S_3 chalcogenide films

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Cited by 76 publications
(55 citation statements)
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“…Above this temperature, films rapidly reach saturation at higher refractive index approaching the accepted bulk value. These saturated refractive indices between 2.3 and 2.4 agree well with indices reported for As 2 S 3 films deposited using other techniques, such as thermal evaporation (n = 2.2-2.4), PECVD (n = 2.3), and pulsed laser deposition (n = 2.4) [5,17,25]. FTIR is used to verify the presence of residual solvent in the films and the effects of film annealing on optical loss in the infrared range.…”
Section: Resultssupporting
confidence: 87%
“…Above this temperature, films rapidly reach saturation at higher refractive index approaching the accepted bulk value. These saturated refractive indices between 2.3 and 2.4 agree well with indices reported for As 2 S 3 films deposited using other techniques, such as thermal evaporation (n = 2.2-2.4), PECVD (n = 2.3), and pulsed laser deposition (n = 2.4) [5,17,25]. FTIR is used to verify the presence of residual solvent in the films and the effects of film annealing on optical loss in the infrared range.…”
Section: Resultssupporting
confidence: 87%
“…In ultra-fast PLD process (see, e.g. [20,71]), the laser pulse energy is lowered and the frequency of pulses is increased in order to decrease the presence of particulates in deposited films. Usually, the PLD is performed using pulses of energy from $0.1 J to several joules from UV excimer lasers with repetition rates up to 100 Hz.…”
Section: Deposition Problemsmentioning
confidence: 99%
“…For example, As 2 S 3 and As 2 Se 3 have bandgap energies around 2.26 eV [150,151] and 1.77 eV [152], and they are transparent up to 12 and 15 µm [153], respectively. Although in this paper chalcogenide glasses are not considered a material for the core of a waveguide, one may use them for waveguide cladding and slot layer [53,58].…”
Section: Methodsmentioning
confidence: 99%