Low-loss ZnO optical waveguides for SAW-AO applications

Abstract

Acoustooptic Bragg deflectors (ABDs) with high diffraction efficiencies were fabricated using ZnO thin films deposited on sapphire, glass, and Si substrates by an RF magnetron sputtering system. Optical waveguide losses of the ZnO films were about 0.5 dBcm(-1). Diffraction efficiencies of 95 and 98% for the TE(0) mode beam (at 632.8 nm) were accomplished by acoustic powers of 90 mW in a ZnO film on glass and 80 mW in a ZnO film on Si, respectively. The diffraction efficiencies of the ABD using a ZnO film on sapphire with interdigital transducers of different Q values and with the surface-acoustic-wave propagating along and perpendicular to the c -axis of the ZnO film were also determined.

CO2 gas sensitivity of sputtered zinc oxide thin films

“…Because zinc oxide is electrically conductive and visually transparent, ZnO is a prime candidate in photo-voltaic and gas sensor applications, varistors (Viswanath et al 1995), surface acoustic wave devices (Wu et al 1989), electric transducers, nanowires, integrated optics including optical wave guides, displays and heaters. Oxide materials such as ZnO can be used in gas sensor applications.…”

Effect of CuO loading on Structural Properties of ZnO

“…It has unique physical and chemical properties, low-dimensional volume, high aspect ratio, light-matter interaction, cost-effectiveness and can be synthesized by various chemical and physical methods ZnO has become one of the most popular materials for electrical and optical applications over the time. It is promising material for many optoelectronic applications such as ultraviolet lasers, light-emitting diodes, p-n junction devices, thin-film transistor, solar cells, acoustic devices, chemical and biological sensors, areas like SAW devices, varistors, transparent electrodes, gas sensors [2][3][4][5][6][7][8][9][10][11][12][13][14][15].…”

Effect of NiO Doping on Structural Properties of ZnO

“…ZnO has become one of the most popular materials for electrical and optical applications over the time. It is promising material for many optoelectronic applications such as ultraviolet lasers, light-emitting diodes, p-n junction devices, thinfilm transistor, solar cells, acoustic devices, chemical and biological sensors [13][14][15][16][17][18][19][20].…”