2012
DOI: 10.1063/1.4742749
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Low mode volume slotted photonic crystal single nanobeam cavity

Abstract: We present and experimentally demonstrate a slotted photonic crystal single nanobeam cavity in silicon. The slot geometry is exploited to achieve ultra-small effective mode volumes, ~0.025({\lambda}/n)^3, more than an order of magnitude smaller than traditional nanobeam cavities. A continuous slot and a tapered photonic crystal design are implemented to achieve experimental quality factors near 10^4. This device structure offers a unique platform for achieving enhanced light-matter interactions and could be us… Show more

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Cited by 64 publications
(47 citation statements)
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“…For example, if one hole is missing in the center of a periodic array of holes, it acts as the defect (see Figure 1d). Except for the introduction of the defects to localize the field, the air-slot [46,89] or the air mode [90] photonic crystal nanobeam cavities can provide a higher quality factor and a lower mode volume. [88] The field is centrally localized, and the cavity mode has a tail of evanescent part that fulfills the same role as a WGM cavity.…”
Section: Microcavity Sensing Mechanismsmentioning
confidence: 99%
See 1 more Smart Citation
“…For example, if one hole is missing in the center of a periodic array of holes, it acts as the defect (see Figure 1d). Except for the introduction of the defects to localize the field, the air-slot [46,89] or the air mode [90] photonic crystal nanobeam cavities can provide a higher quality factor and a lower mode volume. [88] The field is centrally localized, and the cavity mode has a tail of evanescent part that fulfills the same role as a WGM cavity.…”
Section: Microcavity Sensing Mechanismsmentioning
confidence: 99%
“…[88] The field is centrally localized, and the cavity mode has a tail of evanescent part that fulfills the same role as a WGM cavity. Except for the introduction of the defects to localize the field, the air-slot [46,89] or the air mode [90] photonic crystal nanobeam cavities can provide a higher quality factor and a lower mode volume. In contrast to conventional PhCs, nanobeam cavities have one row of regular air holes with a slot (air-slot mode) or without a slot (air mode) between two adjacent cells, which can provide a relatively higher Q factor and smaller mode volume (Q ≈ 10 5 and V ≈ 0.01λ 3 /n air 3 , where n air is the refractive index of the air [90] ).…”
Section: Microcavity Sensing Mechanismsmentioning
confidence: 99%
“…The PhC period a, beam width w, beam thickness t, and air hole radius r are fixed, while the slot width s is quadratically tapered from an initial value to zero over the modulated mirror section. In comparison with previously reported designs with slot width fixed throughout the device, 27 our configuration offers a larger bandgap for mirror modes since at the end of the modulated section, the structure gradually turns to a conventional PhC without air slots. Therefore, it gives more robustness in fabrication and the possibility to design devices in an asymmetric environment, i.e., the device (made of silicon) is placed on top of silicon dioxide and immersed in water.…”
mentioning
confidence: 66%
“…The proposed cavities possess experimental Q factors $12 000, which represent the highest measured value in similar slotted configurations. 21,27 Moreover, our cavities provide strong light confinement in the slotted regions with V m as low as 0.06 (k/n water ) 3 , boosting their performance in sensing applications. The measured refractive index sensitivity is 439 6 3 nm/RIU, more than 5 times better than a typical non-slot nanobeam cavity.…”
mentioning
confidence: 98%
“…This can be done by slots [7] or dielectric nanoantennas [8]. This mechanism is used for cavities as well as for waveguides [7][8][9][10][11], but also applies for evanescent fields at total internal reflection [12].…”
Section: Introductionmentioning
confidence: 99%