Future generations of gravitational wave interferometers are likely to be operated at cryogenic temperatures because one of the sensitivity limiting factors of the present generation is the thermal noise of end mirrors and beam splitters that occurs in the optical substrates as well as in the dielectric coatings. A possible method for minimizing thermal noise is cooling to cryogenic temperatures, maximizing the mechanical quality factor Q, and maximizing the eigenfrequencies of the substrate. We present experimental details of a new cryogenic apparatus that is suitable for the measurement of the temperature-dependent Q-factor of reflective, transmissive as well as nano-structured grating optics down to 5 K. In particular, the SQUID-based and the optical interferometric approaches to the measurement of the amplitude of vibrating test bodies are compared and the method of ring-down recording is described.