Low pressure acoustic sensors for airborne sound with piezoresistive monocrystalline silicon and electrochemically etched diaphragms

Schellin, R.; Strecker, Marina Melanie; Nothelfer, U.; Schuster, G.

doi:10.1016/0924-4247(94)00881-h

Cited by 19 publications

(11 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Significant pretension that may cause a drastic degradation in structural performance such as the deflection-based pressure sensitivity has been discussed by Cho et al [5] and Chau and Wise [6]. A similar remark was later made by Schellin et al [7] in studying the sensitivity of piezo-resistive mono-crystalline sensing diaphragms. They found that the sensitivity will be adversely affected if the initial tension is greater than 1MPa, although it is nearly a constant in the low range of pretension.…”

Section: Introductionmentioning

confidence: 87%

Linear Analytical Study of Large Deflection of Piezoelectric Layered Plate Under Initial Tension

Chen

Huang

2013

J. mech.

View full text Add to dashboard Cite

The linear problem of large deflection of a clamped and layered piezoelectric circular plate under initial tension due to lateral pressure is solved. Von Karman plate theory for large deflection is extended to a symmetrically laminated case including a piezoelectric layer. The thus derived nonlinear governing equations are simplified by neglecting the arising nonlinear terms, yielding a modified Bessel equation or a standard Bessel equation for the lateral slope. These equations are solved analytically by imposing boundary conditions for the clamped edge. For a 3-layered nearly monolithic plate with a low applied voltage upon the piezoelectric layer, the results are in a good agreement with those available in literature for a single-layered plate under pure mechanical loading, thus validates the present approach. Typical 3-layered piezoelectric plates are then implemented and the results show that, piezoelectric effect seems to be apparent only up to a moderate initial tension. For a relatively high pretension, the effect of initial tension appears to be dominant, yielding nearly the same results for the structural responses, regardless of the piezoelectric effect, i.e., the magnitude of voltage applied upon the piezo-electric layer.

show abstract

Section: Introductionmentioning

confidence: 87%

Linear Analytical Study of Large Deflection of Piezoelectric Layered Plate Under Initial Tension

Chen

Huang

2013

J. mech.

View full text Add to dashboard Cite

show abstract

“…Many sensing principles have been reported: piezoelectric [19], piezoresistive [20], and capacitive [21]- [24], including electrets. Capacitive microphones rapidly appeared as the most interesting as regards performances.…”

Section: A the Microphonesmentioning

confidence: 99%

Preliminary results on a silicon gyrometer based on acoustic mode coupling in small cavities

Bourouina

Exertier

Chaumet³

et al. 1997

J. Microelectromech. Syst.

View full text Add to dashboard Cite

A silicon vibratory gas angular rate sensor has been developed by means of micromachining techniques. It is a shockproof sensor because it has no movable part. This device is a miniaturized form of an instrument, which has been previously fabricated in a conventional technology format and called the acoustic gyrometer. The working principle of this sensor is based on acoustic coupling between two orthogonal modes of a closed cavity, due to Coriolis forces effect on vibrating gas particles. The gyrometer, which is presented in this paper, was fabricated by a silicon process. It is constituted by an acoustic cavity and four microphones: one to generate an acoustic wave, one to slave the cavity at its first resonance frequency, and two for the measurement of the angular rate effect. Finiteelement modeling (FEM) modal analyses were performed on two cavity shapes: cylindrical and trapezoidal, corresponding to the fabricated devices. The results are compared with available analytic solutions and with measurements. [261]

show abstract

“…The cause may be due to stretching and packaging during micro-fabrication processes (Voorthuyzen and Bergveld, 1984) or in-plane residual stress due to the mismatch in coefficients of thermal expansion between adjacent wafers in wafer-bonding operation (Su, et al 2001). For a piezo-resistive sensor, the effect of initial tension was investigated by Schellin, et al (1995). It was found that, although a nearly constant sensitivity can be available in the low range of pretension, the sensitivity would be severely and poorly affected if the initial tension goes beyond 1 MPa.…”

Section: Introductionmentioning

confidence: 99%

Analytical geometrical responses in large deflection of simply supported piezoelectric layered plate under initial tension

Chen¹,

Chen

2010

Journal of the Chinese Institute of Engineers

View full text Add to dashboard Cite

The analytical geometrical responses in large deflection of a simply supported and layered piezoelectric circular plate under initial tension due to lateral pressure are presented. The approach follows von Karman plate theory for large deflection with a consideration of a symmetrically laminated case including a piezoelectric layer. The related nonlinear governing equations are derived in a non-dimensional form and are simplified by neglecting the arising nonlinear terms, yielding a modified Bessel equation or a standard Bessel equation for the lateral slope. The associated analytical solutions are developed by imposing the simply supported edge conditions of the problem. For a 3-layered nearly monolithic plate under a low pretension and a low applied voltage upon the piezoelectric layer, the results agree well with those obtained by using the classical plate theory for a single-layered plate under pure mechanical loading, and thus the developed approach is validated. Typical 3-layered piezoelectric plates are then implemented and the results show that, no apparent edge effect was found for the present problem. In additions, a piezoelectric effect appears to be present only up to a moderate initial tension. For a relatively high pretension, the tension effect tends to be dominant, resulting in nearly the same results for the geometrical responses, regardless of the magnitude of the applied voltage.

show abstract

Low pressure acoustic sensors for airborne sound with piezoresistive monocrystalline silicon and electrochemically etched diaphragms

Cited by 19 publications

References 5 publications

Linear Analytical Study of Large Deflection of Piezoelectric Layered Plate Under Initial Tension

Linear Analytical Study of Large Deflection of Piezoelectric Layered Plate Under Initial Tension

Preliminary results on a silicon gyrometer based on acoustic mode coupling in small cavities

Analytical geometrical responses in large deflection of simply supported piezoelectric layered plate under initial tension

Contact Info

Product

Resources

About