Low-pressure measurement limits for silicon piezoresistive circular diaphragm sensors

Matsuoka, Yoshitaka; Yamamoto, Yoshimi; Tanabe, M.; Sshimada, S; Yamada, Kotaro; Yasukawa, Akio; Matsuzaka, Hidetoshi

doi:10.1088/0960-1317/5/1/006

Cited by 16 publications

(13 citation statements)

References 7 publications

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“…However, stretchability is a problem with Si‐based sensors and arises from their strain being typically less than 5%. Integration of Si onto mechanically flexible substrates or flexible micro‐electromechanical system (MEMS) devices is also limited due to its high processing temperatures . Both of these sensors present mature technologies which have not witnessed major technological changes in decades .…”

Section: Graphene Assemblies For Electromechanical Piezoresistive Strmentioning

confidence: 99%

Recent Advances in Sensing Applications of Graphene Assemblies and Their Composites

Tùng

Nine

Krebsz

et al. 2017

Adv Funct Materials

243

139

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Development of next-generation sensor devices is gaining tremendous attention in both academia and industry because of their broad applications in manufacturing processes, food and environment control, medicine, disease diagnostics, security and defense, aerospace, and so forth. Current challenges include the development of low-cost, ultrahigh, and user-friendly sensors, which have high selectivity, fast response and recovery times, and small dimensions. The critical demands of these new sensors are typically associated with advanced nanoscale sensing materials. Among them, graphene and its derivatives have demonstrated the ideal properties to overcome these challenges and have merged as one of the most popular sensing platforms for diverse applications. A broad range of graphene assemblies with different architectures, morphologies, and scales (from nano-, micro-, to macrosize) have been explored in recent years for designing new high-performing sensing devices. Herein, this study presents and discusses recent advances in synthesis strategies of assembled graphene-based superstructures of 1D, 2D, and 3D macroscopic shapes in the forms of fibers, thin films, and foams/aerogels. The fabricated state-of-the-art applications of these materials in gas and vapor, biomedical, piezoresistive strain and pressure, heavy metal ion, and temperature sensors are also systematically reviewed and discussed, and their sensing performance is compared.

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Section: Graphene Assemblies For Electromechanical Piezoresistive Strmentioning

confidence: 99%

Recent Advances in Sensing Applications of Graphene Assemblies and Their Composites

Tùng

Nine

Krebsz

et al. 2017

Adv Funct Materials

243

139

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“…According to the definition of the pressure nonlinearity [14], a small membrane deflection will lead to a drop in the gradient of the output curve, thereby reducing the difference between the real output and ideal linear output is an effective way to improve linearity. Kinnella et al [15] presented a membrane with a thin walled hollow stiffening structure to lessen the 'balloon effect' [16], getting a pressure nonlinearity of less than 0.40% FSS. H. Sandmaier et al [17] proposed a sensor chip structure based on a narrow mass in the center of the membrane to make the membrane become harder and decrease its deflection.…”

Section: Introductionmentioning

confidence: 99%

Design optimization and fabrication of a novel structural piezoresistive pressure sensor for micro-pressure measurement

Cordovilla

Ocaña

2018

Solid-State Electronics

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This paper presents a novel structural piezoresistive pressure sensor with a four-beams-bossed-membrane (FBBM) structure that consisted of four short beams and a central mass to measure micro-pressure The proposed structure can alleviate the contradiction between sensitivity and linearity to realize the micro measurement with high accuracy In this study, the design, fabrication and test of the sensor are involved By utilizing the finite element analysis (FEA) to analyze the stress distribution of sensitive elements and subsequently deducing the relationships between structural dimensions and mechanical performance, the optimization process makes the sensor achieve a higher sensitivity and a lower pressure nonlinearity Based on the deduced equations, a series of optimized FBBM structure dimensions are ultimately determined The designed sensor is fabricated on a silicon wafer by using traditional MEMS bulk-micromachining and anodic bonding technology Experimental results show that the sensor achieves the sensitivity of 4 65 mV/V/kPa and pressure nonlinearity of 0 25% FSS in the operating range of 0-5 kPa at room temperature, indicating that this novel structure sensor can be applied in measuring the absolute micro pressure lower than 5 kPa

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“…Flow sensing by microelectromechanical system (MEMS) technologies, have many advantages compared with their conventional large-scale counterparts, such as anemometers, turbines, Pitot tubes, and so forth [1][2][3][4][5][6][7]. MEMS sensors have many advantages including lower power consumption, higher precision, more rapid response, more improved portability, and lower manufacturing cost [8][9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber

et al. 2013

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In this paper, we present the fabrication and packaging of a cantilever-based airflow sensor integrated with optical fiber. The sensor consists of a micro Fabry-Perot (FP) cavity including a fiber and a micro cantilever that is fabricated using the photolithography method. Airflow causes a small deflection of the micro cantilever and changes the cavity length of the FP, which makes the fringe shift. The pressure distribution and velocity streamlines across the cantilever resulted from the airflow in the channel have been simulated by the finite element method. The experimental results demonstrate that the sensor has a linear sensitivity of 190 [fringe shift (pm)] per (l / min) and a minimum detectable airflow change of 0.05 l∕min.

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Low-pressure measurement limits for silicon piezoresistive circular diaphragm sensors

Cited by 16 publications

References 7 publications

Recent Advances in Sensing Applications of Graphene Assemblies and Their Composites

Recent Advances in Sensing Applications of Graphene Assemblies and Their Composites

Design optimization and fabrication of a novel structural piezoresistive pressure sensor for micro-pressure measurement

Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber

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