Low-resistance ohmic contacts to AlGaAs/GaAs and In0.52Al0.48As/In0.53Ga0.47As modulation-doped structures obtained by halogen lamp annealing

Hong, Won‐Pyo; Seo, Kwang Seok; Bhattacharya, Pallab; Lee, H.

doi:10.1109/edl.1986.26387

IEEE Electron Device Lett.

1986

DOI: 10.1109/edl.1986.26387

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Low-resistance ohmic contacts to AlGaAs/GaAs and In_0.52Al_0.48As/In_0.53Ga_0.47As modulation-doped structures obtained by halogen lamp annealing

Won‐Pyo Hong¹,

Kwang Seok Seo²,

Pallab Bhattacharya³

et al.

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Cited by 13 publications

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Low-resistance ohmic contacts to AlGaAs/GaAs and In_0.52Al_0.48As/In_0.53Ga_0.47As modulation-doped structures obtained by halogen lamp annealing

Cited by 13 publications

References 6 publications

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