1991
DOI: 10.1109/68.87923
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Low series resistance high-efficiency GaAs/AlGaAs vertical-cavity surface-emitting lasers with continuously graded mirrors grown by MOCVD

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Cited by 90 publications
(27 citation statements)
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“…Meanwhile, we also considered parasitic series resistance ( R s ) in the analytic model to accurately analyse the device operation. R s is mainly associated with the contact resistance between the metal electrode and the semiconductor46. Here, the reduction in n-type carrier concentration due to decreasing temperature leads to an increase in the depletion width at the metal/semiconductor (MS) junction and thereby a suppression of the e-field-dependent barrier height lowering effect, eventually increasing the contact resistance at the MS junction (Supplementary Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Meanwhile, we also considered parasitic series resistance ( R s ) in the analytic model to accurately analyse the device operation. R s is mainly associated with the contact resistance between the metal electrode and the semiconductor46. Here, the reduction in n-type carrier concentration due to decreasing temperature leads to an increase in the depletion width at the metal/semiconductor (MS) junction and thereby a suppression of the e-field-dependent barrier height lowering effect, eventually increasing the contact resistance at the MS junction (Supplementary Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Details of the device design and characteristics are given in Ref. 1. The current is injected vertically into a gain-guided active region, whose lateral spreading is confined via proton-implantation.…”
Section: Surface-emithng Lasers As Optical Sourcesmentioning
confidence: 99%
“…1 To the extent that thermal dissipation is not a limiting factor, VCSELS can be integrated into a dense, individually-addressable, two-dimensional array,6 which is a prerequisite for any two-dimensional optical processing architecture. The VCSEL's smaller beam divergence provides reduced optical cross-talk in free space applications.…”
mentioning
confidence: 99%
“…One area that has received substantial interest is in optimizing the electrical and optical properties of the distributed Bragg reflectors (DBRs) used as the VCSEL mirrors. The competing interests of both the optical and electrical requirements of the DBRs necessitates techniques such as alloy compositional grading and modulated doping profiles within the layers in the mirror [1][2][3][4]. Utilizing these methods, high-performance VCSELs, at a variety of wavelengths, have been demonstrated using both metal-organic chemical vapor deposition (MOCVD) and molecular beam epitaxy (MBE).…”
Section: Introductionmentioning
confidence: 99%