2001
DOI: 10.1016/s0040-6090(01)01481-x
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Low stress TiB2 coatings with improved tribological properties

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Cited by 118 publications
(68 citation statements)
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“…At such values of the modulus of elasticity E s and E 0 the modulus of elasticity E f of studied amorphous -nanocrystalline Ti-B films was 590 GPa. These values are very similar to the available references data obtained using the method of nanoindentation for coatings [56] and massive titanium boride [57]. It should be noted that the method of nanoindentation is used for experimental determination of the Young modulus using a film normal and the present method is used to determine the Young modulus in the film plane.…”
Section: E T E T T T T E E E T E T Tsupporting
confidence: 85%
“…At such values of the modulus of elasticity E s and E 0 the modulus of elasticity E f of studied amorphous -nanocrystalline Ti-B films was 590 GPa. These values are very similar to the available references data obtained using the method of nanoindentation for coatings [56] and massive titanium boride [57]. It should be noted that the method of nanoindentation is used for experimental determination of the Young modulus using a film normal and the present method is used to determine the Young modulus in the film plane.…”
Section: E T E T T T T E E E T E T Tsupporting
confidence: 85%
“…[82] In the last two decades, TiB 2 coatings have been deposited using UBM exhibiting low intrinsic stress and extremely high hardness (40-77 GPa) (Fig. 12), [see e.g., [83][84][85] which is far beyond its bulk value of 25 GPa. [82] Recently, Mayrhofer et al proposed a model explaining the origin of the high hardness by the formation of a nanocolumnar structure of B-supersaturated TiB 2+x films showing a pronounced (0001) texture.…”
Section: Reviewsmentioning
confidence: 99%
“…Deposition of TiB 2þx coatings, typically columnar TiB 2 with a B-rich tissue phase, by physical vapor deposition (PVD) has been previously demonstrated by magnetron sputtering from compound targets. [5][6][7][8][9] However, amongst PVD techniques, arc evaporation is more commonly used for synthesis of hard coatings, mainly because of high deposition rate, good adhesion, and a dense morphology. 10 Till date, there is no reproducible synthesis of TiB 26x from arc evaporation and from the reported few attempts on the use of TiB 2 cathodes for thin film synthesis, extensive instability, cracking, and cathode failure.…”
mentioning
confidence: 99%