A reverse base current under high level injection caused by base pushout effect was observed for the first time and investigated in detail. A simple model to study this phenomenon is proposed.The reverse base current induced problem on a BiCMOS circuit is also discussed. This phenomenon causes circuit failure and gives a new limitation factor for applied power supply voltage lower than 0 . 8~ BiCMOS.
IntroductionThe advanced BiCMOS circuit has been operated under high level injection condition. With scaling down in the device feature size, this tendency becomes more severe. Under such high level injection, base pushout effect has readily occurred during normal operation. In such condition, the existence of high electric field at N+ buried layer side, which enough to cause impact ionization has been proposed [l]. In this paper. A base pushout induced reverse base current under high level injection was found for the first time. This phenomenon is clearly different from that observed under low level injection [24]. The mechanism of this phenomenon was analyzed. The influence of the reverse base current on the BiCMOS circuit was also discussed as a new limit of maximum power supply voltage.
Experimental ProcedureIn this study, the conventional polysilicon emitter bipolar transistors were fabricated by 0 . 8~ BiCMOS process [5]. To estimate the relation between base pushout and reverse base current, bipolar transistor collector conditions were varied. Collector concentration (Nd was varied fmm 5x10'' cm-3 to 1~1 0 '~ cm-3 and collector width (Wc) was varied from 0 . 5~ to 0.9pn, which was estimated by SIMS impurity profile. Other typical device parameters are as follows, current gain hFE is 130, emitter size is 1 x 3~. Bipolar transistor characteristics measurement was carried out at wide ambient temperature range from 77K to U)OK. 2dimensional device simulation (MOS2C [6]) was also carried out to investigate this phenomenon. An R-type BiCMOS inverter was also fabricated and evaluated.
Reverse Bast? Current under High Injection LevelA typical Gummel plot of the bipolar transistor at V p 7 V with reverse base current under high level injection is shown in Fig.1. The reverse base current ( I & was observed when emitter-base voltage (V, ) was larger than 0.9V, and when V, exceeds l.lV, the reverse base current disappears. It should be noted that collector current increases drastically when IRB starts to flow. The reverse base current at low level injection condition has been reported which is caused by impact ionization at basecollector depletion region. However, reverse base current at low level injection condition was not observed in this experiment because Nc was low enough to prevent fmm above phenomenon. The reverse base current at such high level injection condition has not been reported. Further, this phenomenon cannot be explained by the previous model [7-101. Figure 2 shows the I-V characteristics of the same device. A snapback phenomenon was observed, which is caused by the existence of the reverse base...