2002
DOI: 10.1143/jjap.41.l112
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Low Temperature Activation of Mg-Doped GaN in O2 Ambient

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Cited by 50 publications
(28 citation statements)
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“…For an efficient activation of p-GaN, a number of studies were attempted by employing the post-thermal annealing process [3][4][5], minority carrier injection [6,7], laser irradiation [8][9][10], and etc. Very recently, the electrochemical potentiostatic activation (EPA) method [11] was proposed to improve the electrical characteristics of Mg-doped p-GaN.…”
Section: Introductionmentioning
confidence: 99%
“…For an efficient activation of p-GaN, a number of studies were attempted by employing the post-thermal annealing process [3][4][5], minority carrier injection [6,7], laser irradiation [8][9][10], and etc. Very recently, the electrochemical potentiostatic activation (EPA) method [11] was proposed to improve the electrical characteristics of Mg-doped p-GaN.…”
Section: Introductionmentioning
confidence: 99%
“…[13][14][15][16][17][18][19][20][21][22][23][24][25][26][27] Briefly, trimethylaluminum, trimethylgallium, trimethylindium, and ammonia were used as aluminum, gallium, indium, and nitrogen sources, respectively. Biscyclopentadienyl magnesium (CP 2 Mg) and disilane (Si 2 H 6 ) were used as the p-type and n-type doping sources, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…Details of the growth conditions can be found elsewhere. [9][10][11][12][13][14][15][16][17] The InGaN/GaN MQW LED structure consists of a 30-nm-thick, GaN-nucleation layer grown at a low temperature of 560°C; a 4-mthick, Si-doped, n-GaN-cladding layer; an InGaN/ GaN MQW active region; a 50-nm-thick, Mg-doped, p-Al 0.15 Ga 0.85 N-cladding layer; and a 0.25-m-thick, Mg-doped, p-contact layer. The InGaN/GaN MQW active region consists of five pairs of 3-nm-thick, In 0.05 Ga 0.95 N-well layers and 12-nm-thick, GaNbarrier layers.…”
Section: Methodsmentioning
confidence: 99%