Handbook of Crystal Growth 2015
DOI: 10.1016/b978-0-444-63304-0.00025-1
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Low-Temperature and Metamorphic Buffer Layers

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Cited by 4 publications
(5 citation statements)
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References 167 publications
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“…The structure is widely adopted (Fig. 1), 4) with different doping atoms and concentrations (Table I).…”
Section: Experimental Methodsmentioning
confidence: 99%
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“…The structure is widely adopted (Fig. 1), 4) with different doping atoms and concentrations (Table I).…”
Section: Experimental Methodsmentioning
confidence: 99%
“…3) Compositionally graded buffers (CGBs) are the most commonly used metamorphic buffers which can produce highly relaxed buffers with smooth surfaces and minimize the threading dislocation density (TDD) through a nucleationlimited mechanism. 4) Many different materials, such as InGaAs, InAlAs, InGaP, GaAsP, GaAsSb, AlGaInAs, AlGaInP, InGaAsP and AlGaAsSb, have been used as metamorphic buffer layers. Yonenaga noted that dislocations migrate faster in III-As than in III-P crystals.…”
Section: Introductionmentioning
confidence: 99%
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“…The realization of semiconductor devices on a lattice-mismatched substrate is typically achieved by metamorphic (partly-relaxed) growth (1)(2)(3)(4)(5)(6), which is accompanied by elastic strains and threading dislocation defects (7). Compositionally-graded buffer layers are commonly employed to accommodate the lattice mismatch (8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20)(21)(22)(23)(24)(25)(26), with the goal of reducing the density of threading dislocations and, in some cases, with the added goal of controlling the residual strain.…”
Section: Introductionmentioning
confidence: 99%
“…A drawback of metamorphic growth is the inherent incorporation of misfit dislocations and their associated threading defects, which can degrade device performance. It is possible to minimize these effects by using a suitable buffer layer grown between the device and its mismatched substrate, and the linearly-graded buffer has been the most-studied approach (6)(7)(8)(9)(10)(11)(12)(13). On the other hand, superlattices have been used either alone (14)(15)(16)(17) or in conjunction with graded layers (18) to filter threading dislocations.…”
Section: Introductionmentioning
confidence: 99%