Low-temperature anodic bonding to silicon nitride

Weichel, S.; Reus, R. de; Bouaidat, S.; Rasmussen, Peter; Hansen, Ole; Birkelund, Karen; Dirac, H.

doi:10.1016/s0924-4247(99)00372-6

Cited by 23 publications

(12 citation statements)

References 9 publications

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“…Before the encapsulation of the nanochannels, the silicon nitride was treated with oxygen plasma (Tepla 132 from PVA Tepla, Feldkirchen, Germany. Parameters: RF power 1000 W, pressure 0.73 mbar, 100 • C, 60 min) to create a surface composed mainly of silicon dioxide [26,27]. The inner surface of our nanochannels consisted of a few monolayers of silicon dioxide exposing silanol groups (Fig.…”

Section: Microfabrication Process Of Nanochannelsmentioning

confidence: 99%

Filling kinetics of liquids in nanochannels as narrow as 27 nm by capillary force

Han

Mondin

Hegelbach

et al. 2006

Journal of Colloid and Interface Science

108

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We report the filling kinetics of different liquids in nanofabricated capillaries with rectangular cross-section by capillary force. Three sets of channels with different geometry were employed for the experiments. The smallest dimension of the channel cross-section was respectively 27, 50, and 73 nm. Ethanol, isopropanol, water and binary mixtures of ethanol and water spontaneously filled nanochannels with inner walls exposing silanol groups. For all the liquids the position of the moving liquid meniscus was observed to be proportional to the square root of time, which is in accordance with the classical Washburn kinetics. The velocity of the meniscus decreased both with the dimension of the channel and the ratio between the surface tension and the viscosity. In the case of water, air-bubbles were spontaneously trapped as channels were filled. For a binary mixture of 40% ethanol and water, no trapping of air was observed anymore. The filling rate was higher than expected, which also corresponds to the dynamic contact angle for the mixture being lower than that of pure ethanol. Nanochannels and porous materials share many physicochemical properties, e.g., the comparable pores size and extremely high surface to volume ratio. These similarities suggest that our nanochannels could be used as an idealized model to study mass transport mechanisms in systems where surface phenomena dominate.

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Section: Microfabrication Process Of Nanochannelsmentioning

confidence: 99%

Filling kinetics of liquids in nanochannels as narrow as 27 nm by capillary force

Han

Mondin

Hegelbach

et al. 2006

Journal of Colloid and Interface Science

108

View full text Add to dashboard Cite

show abstract

“…However, the possibility of bonding glass to materials other than silicon may provide a higher degree of freedom in the device design, and can even be essential for the realization of some devices. Therefore, anodic bonding to polysilicon (von Arx et al 1995), thermal SiO 2 (Plaza et al 1998), and Si 3 N 4 (Weichel et al 2000) have been subject to substantial interest.…”

Section: Introductionmentioning

confidence: 99%

Anodic bonding of glass to aluminium

et al. 2005

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Anodic bonding of glass to aluminium may provide a higher degree of freedom in device design. In this paper, a systematic variation of the bonding parameters for the aluminium-glass bond is presented. Hermetic seals with strengths of 18.0 MPa can be achieved using a 50-100-nm-thick bonding aluminium layer, and bonding at 300-400°C applying a voltage of 1,000-1,500 V for 20 min. With these parameters, bond yields above 95.1% were obtained on 17 wafers. The bonds survived extensive thermal ageing without significant degradation. The possibility of bonding glass to an aluminium layer with buried, electrically isolated conductors underneath is also demonstrated.

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“…33 For anodic bonding to work, it was necessary to form a thin SiO 2 /Si x O y N z layer on the SiN x surface by subjecting it to oxygen plasma. Importantly, the plasma power was kept low (25 W) to minimize surface roughening which can inhibit the bonding process, as described by Weichel et al (32) Anodic bonding optimization was carried out between 400 and 1000 V on a 350–400 °C hot plate for 10–90 min with borosilicate glass (Borofloat 33), which has a matching thermal expansion coefficient to SiN x .…”

Section: Resultsmentioning

confidence: 99%

On-Chip Stretching, Sorting, and Electro-Optical Nanopore Sensing of Ultralong Human Genomic DNA

2019

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Solid-state nanopore sensing of ultralong genomic DNA molecules has remained challenging, as the DNA must be controllably delivered by its leading end for efficient entry into the nanopore. Herein, we introduce a nanopore sensor device designed for electro-optical detection and sorting of ultralong (300+ kilobase pair) genomic DNA. The fluidic device, fabricated in-silicon and anodically bonded to glass, uses pressure-induced flow and an embedded pillar array for controllable DNA stretching and delivery. Extremely low concentrations (50 fM) and sample volumes (∼1 μL) of DNA can be processed. The low height profile of the device permits high numerical aperture, high magnification imaging of DNA molecules, which remain in focus over extended distances. We demonstrate selective DNA sorting based on sequence-specific nick translation labeling and imaging at high camera frame rates. Nanopores are fabricated directly in the assembled device by laser etching. We show that uncoiling and stretching of the ultralong DNA molecules permits efficient nanopore capture and threading, which is simultaneously and synchronously imaged and electrically measured. Furthermore, our technique provides key insights into the translocation behavior of ultralong DNA and promotes the development of all-in-one micro/nanofluidic platforms for nanopore sensing of biomolecules.

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Low-temperature anodic bonding to silicon nitride

Cited by 23 publications

References 9 publications

Filling kinetics of liquids in nanochannels as narrow as 27 nm by capillary force

Filling kinetics of liquids in nanochannels as narrow as 27 nm by capillary force

Anodic bonding of glass to aluminium

On-Chip Stretching, Sorting, and Electro-Optical Nanopore Sensing of Ultralong Human Genomic DNA

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