In this paper, the potential of chemiluminescence (CL) as a tool to determine reaction mechanisms of heterogeneous catalyst is demonstrated. Since CL is emitted from excited species produced in chemical reactions, the analysis of CL is expected to be informative for investigating reaction mechanisms. As a representative example, CL under CO oxidation over copper‐based catalysts was measured. The reaction mechanism of copper‐based catalysts reportedly depends on the support material. CL was observed with CuO/Al2O3 and CuO/SiO2−Al2O3 but was not detected with CuO, CuO/TiO2 and CuO/SiO2. Transient CL emitting analysis for CuO/Al2O3 revealed that CL was emitted via an Eley‐Rideal (ER) mechanism. Although the CO oxidation mechanism over CuO/SiO2−Al2O3 has not been reported, CO oxidation via an ER mechanism was suggested based on the similarities of the CL spectra of CuO/SiO2−Al2O3 and CuO/Al2O3. This suggests the potential of CL as a tool to investigate reaction mechanisms of heterogeneous catalysts.