Low Temperature Crystallization and Thick Single Layer of PbTiO<sub>3</sub>Thin Film by Metallo-Organic Compound Decomposition with an Additive of PVAC

Wu, Xiaoqing; Ren, Wei; Shi, Peng; Li, Haiyan; Yao, Xi

doi:10.1080/00150190600689639

Cited by 5 publications

(1 citation statement)

References 8 publications

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“…To overcome this limitation, polymer addition to the PZT precursor has been examined. 18,19) In particular, poly(vinylpyrrolidone) (PVP) addition is attracting much attention because it can increase film thickness and inhibite crack formation. Kozuka and Yamano reported that submicron-thick PZT films prepared by single-step sol-gel deposition were realized.…”

Section: Introductionmentioning

confidence: 99%

Effect of Poly(vinylpyrrolidone) As a Stress-Relaxing Additive in Fabrication of PbZr_xTi_1-xO₃ Thin Films Using Sol–Gel Route

Doi

Soyama

2013

Jpn. J. Appl. Phys.

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We investigated how poly(vinylpyrrolidone) (PVP) suppresses crack generation during fabrication. It was confirmed that PVP plays the role of a stress-relaxing agent by in situ stress development measurement at temperatures from 200 to 300 °C. We found that PVP in the film was removed in two steps and that the residual PVP-decomposition product can be the cause of void generation. It was revealed that Young's modulus of the lead zirconate titanate (PZT) film prepared from PZT–PVP-sol was lower at temperatures from 300 °C to less than that from 400 °C than from PZT-sol during fabrication despite the fact that the each values at 450 °C are almost the same. It implies that PVP suppress crack formation by degrading Young's modulus of the film before crystallization. We obtained a 2-µm-thick PZT film with only 10 coatings and its electrical properties is equivalent to previously reported values obtained using the sol–gel route.

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Section: Introductionmentioning

confidence: 99%

Effect of Poly(vinylpyrrolidone) As a Stress-Relaxing Additive in Fabrication of PbZr_xTi_1-xO₃ Thin Films Using Sol–Gel Route

Doi

Soyama

2013

Jpn. J. Appl. Phys.

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Gaining new insight into low-temperature aqueous photochemical solution deposited ferroelectric PbTiO 3 films

Dobbelaere

Calzada

Bretos

et al. 2016

Materials Chemistry and Physics

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Preparation of Diffuser-Type Micropumps Using PZT Thin Films Prepared by Metallo-Organic Compound Decomposition Process

Ren

Chen

et al. 2009

Ferroelectrics

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Low Temperature Crystallization and Thick Single Layer of PbTiO₃Thin Film by Metallo-Organic Compound Decomposition with an Additive of PVAC

Cited by 5 publications

References 8 publications

Effect of Poly(vinylpyrrolidone) As a Stress-Relaxing Additive in Fabrication of PbZr_xTi_1-xO₃ Thin Films Using Sol–Gel Route

Effect of Poly(vinylpyrrolidone) As a Stress-Relaxing Additive in Fabrication of PbZr_xTi_1-xO₃ Thin Films Using Sol–Gel Route

Gaining new insight into low-temperature aqueous photochemical solution deposited ferroelectric PbTiO 3 films

Preparation of Diffuser-Type Micropumps Using PZT Thin Films Prepared by Metallo-Organic Compound Decomposition Process

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Low Temperature Crystallization and Thick Single Layer of PbTiO3Thin Film by Metallo-Organic Compound Decomposition with an Additive of PVAC

Cited by 5 publications

References 8 publications

Effect of Poly(vinylpyrrolidone) As a Stress-Relaxing Additive in Fabrication of PbZrxTi1-xO3 Thin Films Using Sol–Gel Route

Effect of Poly(vinylpyrrolidone) As a Stress-Relaxing Additive in Fabrication of PbZrxTi1-xO3 Thin Films Using Sol–Gel Route

Gaining new insight into low-temperature aqueous photochemical solution deposited ferroelectric PbTiO 3 films

Preparation of Diffuser-Type Micropumps Using PZT Thin Films Prepared by Metallo-Organic Compound Decomposition Process

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Product

Resources

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Low Temperature Crystallization and Thick Single Layer of PbTiO₃Thin Film by Metallo-Organic Compound Decomposition with an Additive of PVAC

Effect of Poly(vinylpyrrolidone) As a Stress-Relaxing Additive in Fabrication of PbZr_xTi_1-xO₃ Thin Films Using Sol–Gel Route

Effect of Poly(vinylpyrrolidone) As a Stress-Relaxing Additive in Fabrication of PbZr_xTi_1-xO₃ Thin Films Using Sol–Gel Route