2010
DOI: 10.1016/j.apsusc.2009.10.002
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Low temperature deposition of transparent conducting ITO/Au/ITO films by reactive magnetron sputtering

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Cited by 76 publications
(29 citation statements)
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“…This indicates that the crystallinity of the GZO film deteriorated with the addition of an amorphous Ni interlayer in GZO/Ni/GZO films. In a previous study, Kim et al reported that the microstructure of the upper ITO film in trilayer ITO/ Au/ITO film is aligned with the (400) plane corresponding to the indium oxide bixbyite structure due to the presence of a crystalline Au interlayer [10]. However, the GZO/Ni/GZO films showed different results in that a Ni interlayer did not affect the GZO crystallization in this study.…”
Section: Resultscontrasting
confidence: 75%
“…This indicates that the crystallinity of the GZO film deteriorated with the addition of an amorphous Ni interlayer in GZO/Ni/GZO films. In a previous study, Kim et al reported that the microstructure of the upper ITO film in trilayer ITO/ Au/ITO film is aligned with the (400) plane corresponding to the indium oxide bixbyite structure due to the presence of a crystalline Au interlayer [10]. However, the GZO/Ni/GZO films showed different results in that a Ni interlayer did not affect the GZO crystallization in this study.…”
Section: Resultscontrasting
confidence: 75%
“…Two types of coatings are used for the following practical applications: 3,4,[20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36][37] • low-e coatings for reduction of heat losses through the glazing due to refl ection of long-wavelength IR radiation back into the building interior; • low-e solar control coatings for the elimination of solar gains due to the refl ection of the near IR part of solar radiation into the exterior.…”
Section: Glass With Low-emissivity Coatingsmentioning
confidence: 99%
“…The metal-layer in tri-layer structures should be thin, uniform, continuous, and it should exhibit crystallization for low resistivity and high transmittance. The reports on ITO/metal/ITO films with an embedded metal layer of about 10 nm thickness are very promising [19,20]. The structural, electrical, and optical properties of the GZO/Au/GZO multilayers are reported as a function of varying Au metal interlayer thickness from 0 to 12 nm [8], wherein 9 nm interlayer is shown to be the optimal.…”
Section: Introductionmentioning
confidence: 98%