The Young's modulus and fracture strength of silicon nanowires with diameters between 15 and 60 nm and lengths between 1.5 and 4.3 µm were measured. The nanowires, grown by the vapor-liquid-solid process, were subjected to tensile tests in situ inside a scanning electron microscope. The Young's modulus decreased while the fracture strength increased up to 12.2 GPa, as the nanowire diameter decreased. The fracture strength also increased with the decrease of the side surface area; the increase rate for the chemically synthesized silicon nanowires was found to be much higher than that for the microfabricated silicon thin films. Repeated loading and unloading during tensile tests demonstrated that the nanowires are linear elastic until fracture without appreciable plasticity.Silicon (Si) nanowires (NWs) are one of the key building blocks for nanoelectronic and nanoelectromechanical devices. 1 They exhibit excellent mechanical, 2,3 electrical, 4 and optical 5 properties, in addition to interesting multifunctional properties such as piezoresistivity 6 and thermoelectricity. [7][8][9] As such, Si NWs have been used in a broad range of applications including nanoelectronics, 10-12 nanosensors, 13 nanoresonators, 14 light-emitting diodes, 15 and thermoelectric energy scavengers. 7,8 The operation and reliability of these nanodevices depend on the mechanical properties of Si NWs, which are expected to be different from their bulk counterparts due to their increasing surface-to-volume ratio.Existing techniques for measuring the mechanics of individual NWs include observing the vibration (or resonance) of cantilevered NWs inside a transmission or scanning electron microscope (TEM/SEM), [16][17][18] measuring the lateral bending of suspended NWs with an atomic force microscope (AFM), 3,19-21 measuring uniaxial tension of suspended NWs in SEM or TEM, 2,22-26 and nanoindentation of NWs on a substate. 27 Available experimental results on Si NWs exhibit significant scatter including the following: (1) some reported a decrease in Young's modulus with decreasing size, 2,9,24,28 while others showed an opposite trend; 20,21 (2) the reported strength values of vapor-liquid-solid (VLS) grown Si NWs ranged from 500 MPa to 12 GPa; 3,28 (3) Han et al. 2 observed pronounced plastic deformation of Si NWs by in situ TEM tensile tests at room temperature, while Gordon et al. 21 reported linear elastic behavior followed by brittle fracture using AFM bending tests.Moreover the experimental data show large discrepancy with the simulation results. 29 For instance, the experimentally measured Young's moduli started deviating from the bulk value at diameters of about 200 nm; 28 conversely, computational studies using both density functional theory (DFT) and classical molecular dynamics (MD) indicated that the transition diameter for Young's modulus of Si NWs is less than 10 nm. [30][31][32] The experimentally observed plasticity at room temperature occurred for Si NWs with diameter less than 60 nm, while MD simulations 33 predicted a simi...