Low Temperature Preparation of Ferroelectric Relaxor Composite Thick Films

Abstract

In this work, the fabrication and characterization of a composite films comprising classical ferroelectric (PbTiO3, PT) and relaxor (PbMg1/3Nb2/3O3, PMN) material is reported. Thick films consisting of ferroelectric and relaxor phases in the thickness range of 2–10 μm are fabricated on Pt‐coated Si substrates at a temperature of ≤550°C via a modified sol–gel route. The phase purity of the composite films was determined by X‐ray powder diffraction pattern. The morphology and composition homogeneity were analyzed by scanning electron microscopy (SEM), energy‐dispersive X‐ray analysis (EDX), and by X‐ray mapping method, respectively. High dielectric permittivity (ɛ≈1100) and low loss values (tan δ≈0.03) at 1 kHz and room temperature were measured on 2‐μm‐thick composite films for a particular composition of 83 mol% of a PT phase and 17 mol% of a PMN phase, with associated remanent polarization of P≈31.6 μC/cm2 and coercive field of Ec≅166 kV/cm. Piezo‐response force microscopy analysis of the composite film showed that the film is piezoelectric and switchable. The temperature dependence of the effective dielectric permittivity and loss of the films at different frequencies was studied in the temperature range −50° to 200°C. In the temperature range used for applications (−50° to +100°C) the composite shows quite low temperature coefficient of capacitance (TCC=100%(CT−C−50°)/C−50°C))=18%, much lower than both PMN thick film and PT film in the same temperature range. This composition is therefore promising for low TCC applications.

The structures and dielectric properties of Ba0.80Sr0.20TiO3/Pb0.82La0.18TiO3 composite thick films with addition of PbO–B2O3 glass

“…[1][2][3][4] Thick films have recently been investigated as candidates for such applications because of the potential benefits of lower fabrication cost and better properties compared to thin film forms. 5 Lowering the sintering temperatures of the thick films is in demand in order to be compatible with the IC technology and to reduce manufacturing cost (energy consumption and Ag bottom electrode).…”

Relaxor behavior and dielectric properties of lead magnesium niobate–lead titanate thick films prepared by electrophoresis deposition

“…PMN and PMN-PT thin and thick films have also received great * Corresponding author. attention for microelectronic applications such as microactuators [6].…”

Preparations and characterizations of perovskite 0.80PMN–0.20PT ceramic by using a one-step calcination method

“…thick films have also received great attentions for microelectronic applications such as microactuators [6].…”