2012
DOI: 10.1002/adma.201103173
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Low‐Temperature, Solution‐Processed and Alkali Metal Doped ZnO for High‐Performance Thin‐Film Transistors

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Cited by 206 publications
(121 citation statements)
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“…Sheet resistance is lower, and figure-of-merit higher, for mixed solvent cast precursor even compared to work using higher capacitance ionic liquid (rather than aqueous) gate medium [21], or casting dissolved (rather than precursor-route) ZnO [23].…”
Section: This Workmentioning
confidence: 99%
“…Sheet resistance is lower, and figure-of-merit higher, for mixed solvent cast precursor even compared to work using higher capacitance ionic liquid (rather than aqueous) gate medium [21], or casting dissolved (rather than precursor-route) ZnO [23].…”
Section: This Workmentioning
confidence: 99%
“…[24][25][26][27][28][29][30] Moreover, for instance, Cs-doped TiO 2 , Csdoped ZnO, Al-doped ZnO, Al-doped MoO 3 and metal oxides incorporated with other functional elements have been developed to realize efficient carrier transport with other features of high conductivity, the carrier blocking effect and optical enhancement. [31][32][33][34][35][36][37][38] These doped metal oxide interfacial layers require high-temperature annealing or co-evaporation methods, and the film formation is usually limited to either normal or inverted device architecture only.…”
Section: Introductionmentioning
confidence: 99%
“…In addition, the starting Zn solutions were prepared by directly dissolving Zn(OH) 2 in aqueous ammonia solutions, to produce a so-called 'impurity-free precursor'. The use of zinc hydroxide allowed for low-temperature ZnO formation, indicating rapid, low-energy kinetics of metal-amine dissociation and simple dehydration and condensation reactions to form ZnO films [61,62]. The undoped ZnO (140°C under microwave-assisted annealing) and Li doped ZnO TFTs (300°C annealing) exhibited remarkable performance: μ fe~1 .7 cm 2 /V · s and 11.45 cm 2 /V · s for undoped and Lidoped devices, respectively.…”
Section: Solution Processed Oxide Semiconductorsmentioning
confidence: 99%
“…The third process is a simple and novel 'aqueous route' for fabricating oxide TFTs at annealing temperatures below 200°C, suggested by several researchers [60][61][62]. The suggested aqueous route provides low-temperature oxideformation and good stability by restricting the hydrolysis and condensation reactions within a solution state.…”
Section: Solution Processed Oxide Semiconductorsmentioning
confidence: 99%