2007
DOI: 10.1016/j.jeurceramsoc.2007.04.004
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Low-temperature synthesis/densification and properties of Si2N2O prepared with Li2O additive

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Cited by 65 publications
(42 citation statements)
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“…(7)-(9), which may not be consistent with the measured value 6.17 by Tong et al [9]. However, it is found that in their experiment, some Li 2 O has been used for additive to prepare Si 2 N 2 O, and it is observed that the dielectric constant of Si 2 N 2 O is enhanced with the increase of residual Li content [9]. Therefore, when a comparison is made between the predicted value and the measured value from Tong et al, the effect of Li on the dielectric constant of Si 2 N 2 O should be considered.…”
Section: Dielectric Constant and The Additivity Rulecontrasting
confidence: 69%
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“…(7)-(9), which may not be consistent with the measured value 6.17 by Tong et al [9]. However, it is found that in their experiment, some Li 2 O has been used for additive to prepare Si 2 N 2 O, and it is observed that the dielectric constant of Si 2 N 2 O is enhanced with the increase of residual Li content [9]. Therefore, when a comparison is made between the predicted value and the measured value from Tong et al, the effect of Li on the dielectric constant of Si 2 N 2 O should be considered.…”
Section: Dielectric Constant and The Additivity Rulecontrasting
confidence: 69%
“…Correspondingly, the calculated dielectric constant is 5.63 according to Eqs. (7)-(9), which may not be consistent with the measured value 6.17 by Tong et al [9]. However, it is found that in their experiment, some Li 2 O has been used for additive to prepare Si 2 N 2 O, and it is observed that the dielectric constant of Si 2 N 2 O is enhanced with the increase of residual Li content [9].…”
Section: Dielectric Constant and The Additivity Rulementioning
confidence: 74%
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“…This means that asilicon nitride is completely transformed into b-silicon nitride. Formation of Si 2 N 2 O indicates two reaction possibilities [62][63][64][65][66][67][68][69][70][71][72]. First, capturing the oxygen from zirconia and reaction with silicon nitride.…”
Section: Characterizationmentioning
confidence: 99%