“…(7)-(9), which may not be consistent with the measured value 6.17 by Tong et al [9]. However, it is found that in their experiment, some Li 2 O has been used for additive to prepare Si 2 N 2 O, and it is observed that the dielectric constant of Si 2 N 2 O is enhanced with the increase of residual Li content [9]. Therefore, when a comparison is made between the predicted value and the measured value from Tong et al, the effect of Li on the dielectric constant of Si 2 N 2 O should be considered.…”