Directed vapor deposition (DVD) is a recently developed electron beam-based evaporation technology designed to enhance the creation of high performance thick and thin film coatings on small area surfaces (generally 100 cm 2 or less). DVD technology development has been driven by a desire to combine four processing capabilities into one industrially appealing system. These capabilities are: 1) very high rate deposition (5 µm/min and higher over a 100 cm 2 area), 2) very high material utilization efficiencies (on 100 cm 2 areas, efficiencies should at least triple that of other coating technologies), 3) precise control of growing film atomic structure, and 4) highly flexible definition of growing film atomic composition. These criteria have led to the development of a unique plasmaenhanced electron beam evaporation tool which will be described here. Initial experimental and modeling results will also be presented to demonstrate how the selected technology solution is allowing the desired processing features to be achieved.Keywords: directed vapor deposition, DVD, high rate evaporation, low vacuum materials processing, electron beam evaporation
IntroductionFor many years vapor deposited coatings have been recognized as valuable components of numerous engineered consumer products. Such coatings are regularly incorporated into products to provide functionality unachievable through other means. Sometimes the coatings act as a barrier, e.g. environmental protection or surface wear resistance. In other instances they play roles as active components in the engineering system, e.g. converting the sun's energy to electricity or storing bits of computer information in magnetic domains. In all cases, introduction of the vapor deposited coating is motivated by some product specification which cannot be met through other means. Engineers recognize that each coating makes it possible to deliver the specified product with the required performance characteristics. At the same time, they know that use of the coating adds to the cost of the product. The competition between performance need and product cost drives the search for new vapor deposition technology which can provide desired performance at a lower market cost.
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