“…14 This is because charge carriers induced in the IGZO TFT with high- k dielectrics can increase the effective mobility with an increase in the applied gate bias. 15 However, in this study, high mobility IGZO TFTs with conventional SiO 2 gate dielectrics operating at 5 V were realized. As shown in Fig.…”
High-quality indium-gallium-zinc oxide (IGZO) films synthesized by atomic layer deposition (ALD) using a single cocktail precursor based on a liquid-delivery system are demonstrated for the first time. A bottom-gate-top-contact thin-film...
“…14 This is because charge carriers induced in the IGZO TFT with high- k dielectrics can increase the effective mobility with an increase in the applied gate bias. 15 However, in this study, high mobility IGZO TFTs with conventional SiO 2 gate dielectrics operating at 5 V were realized. As shown in Fig.…”
High-quality indium-gallium-zinc oxide (IGZO) films synthesized by atomic layer deposition (ALD) using a single cocktail precursor based on a liquid-delivery system are demonstrated for the first time. A bottom-gate-top-contact thin-film...
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