In this study, we present a low thermal budget microwave annealing (MWA) method for calcination of electrospun In-Ga-ZnO (IGZO) nanofibres and demonstrate an improvement in the performance of IGZO nanofibre field-effect transistors (FETs) by Ar/O 2 mixed-plasma surface treatment. The IGZO nanofibres were fabricated by electrospinning method and calcined using MWA method. This process allowed for a significant reduction in the heat treatment temperature and time. Subsequently, plasma surface treatment using various ratios of Ar/O 2 gas mixtures was carried out. The surface morphology and chemical composition of MWA-calcined and plasma-treated IGZO nanofibres were studied by SEM and XPS analysis. In order to investigate the effects of MWA calcination combined with Ar/O 2 mixedplasma treatment on the electrical properties and the reliability of nanofibres-based transistors, IGZO nanofibres FETs were fabricated and applied to resistor-loaded inverters. Our results show that the O 2 plasma treatment significantly improves the performance of IGZO nanofibres FETs and the resistorloaded inverters based on IGZO nanofibres FETs, whereas Ar plasma treatment degrades the performance of these devices. The instability tests using positive bias temperature stress (PBTS) and negative bias temperature stress (NBTS) revealed that the O 2 plasma treatment contributed to the stability of IGZO nanofibres FETs. Our results suggest that the MWA calcination combined with the Ar/O 2 mixed-plasma surface treatment is a promising technique for the fabrication of high performance IGZO nanofibres FETs with low thermal budget processes. Recently, the application of amorphous oxide semiconductors (AOS) as backplanes for the thin film transistors (TFTs) of active matrix liquid crystal displays (AMLCDs) and active matrix organic light emitting diode displays (AMOLEDs) has been an actively researched topic owing to its advantages over the currently existing technology 1,2. Especially, amorphous indium gallium zinc oxide (a-IGZO) TFTs exhibit higher mobility than amorphous silicon (a-Si:H) TFTs, and they possess a superior uniformity compared with the polycrystalline silicon (poly-Si) TFTs because of their amorphous structure 3-5. In addition, a-IGZO has a wide band gap and high transmittance in the visible region, which makes it easy to access transparent optoelectronics 6,7. Despite these advantages, achieving a desired flexibility and stretchability in a-IGZO films still remains challenging. In addition, IGZO deposited by vacuum equipment, such as radio frequency (RF) magnetron sputtering, chemical vapor deposition (CVD) or atomic-layer-deposited (ALD), requires expensive equipment, and is disadvantageous for long process time and large area deposition. Recent intensive efforts have been focussed on the fabrication of IGZO nanofibres for their applications in the next-generation electronics, which are more flexible and stretchable 8-10. Electrospinning is one of the most commonly used manufacturing methods of nanofibres owing to its low manufac...