Lowering Melting Points of Ruthenium(III) Complexes as Precursors for Metalorganic Chemical Vapor Deposition.

Tasaki, Yuzo; Kataoka, Hiroto; Nagami, Takayoshi; Satoh, Munetake; Yoshizawa, Shuji; Hidaka, Hisao

doi:10.1246/nikkashi.1997.648

NIPPON KAGAKU KAISHI

1997

DOI: 10.1246/nikkashi.1997.648

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Lowering Melting Points of Ruthenium(III) Complexes as Precursors for Metalorganic Chemical Vapor Deposition.

Yuzo Tasaki¹,

Hiroto Kataoka²,

Takayoshi Nagami³

et al.

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Lowering Melting Points of Ruthenium(III) Complexes as Precursors for Metalorganic Chemical Vapor Deposition.

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