&lt;title&gt;Absolute measurements of 3D shape using white-light interferometer&lt;/title&gt;

Itoh, Masahide; Tian, Ronglong; Yatagai, Toyohiko

doi:10.1117/12.140782

Cited by 9 publications

(4 citation statements)

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“…White-light interferometry (low-coherence interferometry) is a powerful diagnostic technique which has become an attractive and a useful method for fast and accurate 3D inspection of macroscopic objects. Typical branches of application of the white-light interferometer are contactless surface diagnostics of macroscopic objects, surface roughness and quality assurance, thickness of thin film measurement and optical tomography [1][2][3][4][5][6]. Michelson interferometer with a white-light source.…”

Section: Interferometric Arrangementmentioning

confidence: 99%

White-light fringe detection based on a novel light source and colour CCD camera

Buchta

Mikel

Lazar

2011

Meas. Sci. Technol.

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We describe in this paper a pilot experiment of optimization of a white-light source for a low-coherence interferometry. The white-light source combines the light beams generated with colour LEDs. By modelling the white-light spectra, the contrast of a white-light interference fringe could be changed and set to the maximal value. The second part of this paper is a description of a white-light fringe analysis ensured with a low-cost colour CCD camera. The used detection technique employs a phase-crossing algorithm which identifies a zero optical path difference as the point where the phase difference between the red, green and blue parts of the white-light interference fringe becomes equal to zero. The optimized white-light source is designed to be a crucial part of an experimental setup for the surface diagnostics and automatic calibration of gauge blocks.

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Section: Interferometric Arrangementmentioning

confidence: 99%

White-light fringe detection based on a novel light source and colour CCD camera

Buchta

Mikel

Lazar

2011

Meas. Sci. Technol.

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“…To enhance the measurement range of optical interferometry methods, a number of techniques have been recently developed. These include multiwavelength interferometry [2] and white light interferometry [3]. In this study, we report the development of a low-cost portable microscope for manufacturing applications as opposed to most commercially available optical measurement systems.…”

Section: Introductionmentioning

confidence: 99%

Development of a Portable Optical Interferometry Microscope System

Nishimoto¹,

Yamaguchi²,

Kimura

et al. 2015

KEM

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Optical interferometry methods are widely used for measuring microdisplacement with nanometer accuracy. However, most commercially available optical interferometry systems are large and expensive for manufacturing applications. In this study, we report the development of a low-cost portable optical interferometry microscope for factory use. The light source was a tungsten–halogen white lamp with an optical filter. The microscope has an objective lens with a numerical aperture of 0.3, a magnifying power of 10, and field depth of 3.056 μm. Interference images were collected with an NTSC CCD-video camera. The resolution of the interference image is 320 × 240 pixels and stored in BMP format. To obtain phase shifted interferometry images, a piezoelectric actuator was used to monitor the table movement along the optical axis. The total cost of all system parts is approximately 7000 to 8000 US dollars. To evaluate the basic performance of the developed interferometry microscope, we measured a steel ball, the penetration mark of a Rockwell scale hardness indenter, and a gauge block surface with a bump. The developed interferometry microscope can measure continuous and gently sloping surfaces. The processing time is approximately 10–20 s.

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“…Typical branch of application of white-light interferometer is contactless surface diagnostics of macroscopic objects, surface roughness and quality assurance, thickness of thin film measurement and optical tomography [1][2][3][4][5][6] …”

Section: Introductionmentioning

confidence: 99%

Light source for low-coherence interferometry surface diagnostics

et al. 2011

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We describe in this paper a pilot experiment of optimization of a white-light source for a low-coherence interferometry. The white-light source combines the light beams generated with colour LEDs. By modelling of the white light spectra, a contrast of a white light interference fringe could be changed and set to the maximal value.The second part of this paper is a description of a white-light fringe analysis ensured with a low-cost colour CCD camera. The used detection technique employs a phase-crossing algorithm which identifies a zero optical path difference as the point where the phase difference between the red, green and blue part of the white-light interference fringe becomes equal to zero.The optimized white light source is designed to be a crucial part of an experimental setup for the surface diagnostics and automatic calibration of gauge blocks.

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<title>Absolute measurements of 3D shape using white-light interferometer</title>

Cited by 9 publications

References 0 publications

White-light fringe detection based on a novel light source and colour CCD camera

White-light fringe detection based on a novel light source and colour CCD camera

Development of a Portable Optical Interferometry Microscope System

Light source for low-coherence interferometry surface diagnostics

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